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ACCEPTED MANUSCRIPT

Improvement of photothermal heating efficiency of Si plasmonic waveguide heaters with ring resonators

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Accepted Manuscript online 19 April 2024 © 2024 The Japan Society of Applied Physics

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DOI 10.35848/1347-4065/ad40ec

10.35848/1347-4065/ad40ec

Abstract

We report improved photothermal heating efficiency of the Si plasmonic waveguide heaters integrated with ring resonators by enhancing the interaction of the propagating light and metal with thinner buffer layer. The resonance wavelength was shifted toward a longer wavelength by inputting transverse magnetic mode light, and the amount of shift was influenced by lengths of the region deposited with the Co thin film, and gap of the directional coupler. The local temperature rise was 580 K by injecting 6.3 mW light, and the photothermal conversion efficiency as high as 106 K/mW was obtained in a Si plasmonic waveguide deposited with 0.5 μm-long Co thin films, showing improvement compared with previous devices. Discussion on the heating efficiency based on the propagation loss and cavity loss in the ring resonators is given based on experimental results, for realizing compact photothermal waveguide heaters for various applications.

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