Abstract
A hydrogen gas sensor based on a silicon microring resonator (MRR) with a Pt-SiO2 thin film as a hydrogen-sensitive film is proposed and investigated to realize a high-sensitivity hydrogen sensor. The sensor detects hydrogen using the resonant wavelength shift caused by reaction heat generated in the Pt-SiO2 film. In the hydrogen exposure measurement, resonant wavelength shifts of approximately 5.0 and 2.4 nm were observed at hydrogen concentrations of 4.0 and 0.4 vol.%, respectively, showing the high sensitivity of the proposed sensor. In addition, an MRR sensor with an Al2O3 upper cladding layer is proposed, and its higher sensitivity is theoretically demonstrated.
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