Abstract
The time dependence of airborne particle count in connected clean units with a feedback loop in a clean-unit system platform (CUSP) is studied. We have estimated the mutual conductance of air flow in connected CUSP units, and the conductance is confirmed to be irrespective of the sizes of airborne particles. The connected CUSP units can maintain a cleanliness as good as ISO class 1–2 even when they are set in a typical office room. The emission rate of physically adsorbed particles from the inner walls of our CUSP unit is found to be 0.012 m-2 s-1 for particles with diameters of 0.3 µm. The airborne particle count in a deactivated CUSP unit, under the condition that the neighboring CUSP unit is activated, remains only ∼5 times larger than that in the activated CUSP units even for particles with diameters of 0.1 µm. The CUSP can serve as a platform for cross-disciplinary fields such as nanostructure physics as well as nanobiotechnologies.