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A Simple Negative Bias Temperature Instability Characterization Methodology to Minimize the Immediate Recovery Effect during Measurement

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Published 4 August 2006 Copyright (c) 2006 The Japan Society of Applied Physics
, , Citation J. B. Yang et al 2006 Jpn. J. Appl. Phys. 45 6137 DOI 10.1143/JJAP.45.6137

1347-4065/45/8R/6137

Abstract

Negative bias temperature instability (NBTI) degradation of p-channel metal–oxide–semiconductor field effect transistors ( p-MOSFETs) is significantly underestimated by using the conventional characterization techniques due to a severe NBTI recovery during the measurements. In this work, a simple characterization method based on the single-point measurement of the saturated drain current is proposed to minimize the unwanted recovery effect. This method is accurate as is proven by a carefully-designed experiment. With this new proposed method, the measurement time is reduced to tens of milliseconds. This method gives a closer-to-real threshold voltage shift, and yields a more reliable power-law factor and thus a more realistic NBTI picture.

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10.1143/JJAP.45.6137