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Leaky Surface Acoustic Waves on Langasite with Thin Dielectric Films

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Copyright (c) 2002 The Japan Society of Applied Physics
, , Citation Shoji Kakio et al 2002 Jpn. J. Appl. Phys. 41 3494 DOI 10.1143/JJAP.41.3494

1347-4065/41/5S/3494

Abstract

The propagation characteristics of leaky surface acoustic waves on rotated Y-cut langasite with a thin dielectric film, such as those of tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2), are investigated theoretically and experimentally, mainly in terms of the attenuation. The theoretical analysis showed that, for a certain range of the cut angle, the attenuation can be reduced by choosing the appropriate material and thickness of the film. In fact, the estimated propagation loss of the leaky surface acoustic wave on (0°, 140°, 42°)-cut langasite with RF-sputtered Ta2O5 film decreased to approximately one-tenth that of the sample without the thin film.

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10.1143/JJAP.41.3494