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Resonance Frequency of Vibrating Resonator Deformed by Axial Force

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Copyright (c) 2002 The Japan Society of Applied Physics
, , Citation Subaru Kudo and Sumio Sugawara 2002 Jpn. J. Appl. Phys. 41 3439 DOI 10.1143/JJAP.41.3439

1347-4065/41/5S/3439

Abstract

In this paper, the resonance frequency of a vibrating resonator used as a force sensor has been considered. The value of resonance frequency change of the resonator deformed by the axial force is calculated using the finite element method. Then, the resonance frequency change considering the stress distribution of the resonator by the axial force is also calculated. The difference between the two kinds of resonance frequency changes is quantitatively clarified.

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10.1143/JJAP.41.3439