Abstract
We investigated new features (functions) of scanning nonlinear dielectric microscopy (SNDM), namely, higher-order nonlinear dielectric imaging and the very high vertical resolution. The resolution of the higher-order nonlinear dielectric imaging is higher than that of the conventional nonlinear dielectric imaging which detects the lowest order of the nonlinear dielectric constant. The very high vertical resolution of SNDM is also reported. These features of the SNDM enable us to obtain a new microscopy for measuring the topography or a new displacement sensor with extremely high sensitivity.