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Spatially Selective Metal Deposition into a Hole-Array Structure of Anodic Porous Alumina Using a Microelectrode

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Copyright (c) 1998 The Japan Society of Applied Physics
, , Citation Hideki Masuda et al 1998 Jpn. J. Appl. Phys. 37 L1090 DOI 10.1143/JJAP.37.L1090

1347-4065/37/9A/L1090

Abstract

Spatially selective electrochemical deposition of a metal (Ni) into the ordered nanohole-array structure of anodic porous alumina was performed using a microelectrode. A patterned deposit consisting of fine Ni cylinders of 70 nm diameter was obtained in the hole-array structure with spatial resolution on the order of tens of micrometers, and its size was in good agreement with that of the microelectrode used as a tip.

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10.1143/JJAP.37.L1090