Computer Modeling on the Effect of the Multistep Nanoimprinting Process in Elastic Deformation Recovery of COC (Cyclic Olefin Copolymer)

The effect of the multistep imprint in elastic deformation recovery was studied numerically with more than one roll and different depth ratios. As well as effect hold-on time on the elastic deformation recovery of polymer Cyclic Olefin Copolymer (COC) material was studied using Generalized Maxwell (GM) constitutive model and their parameters in finite element simulation software of ABAQUS were presented. Firstly, the modified Genetic Algorithm (GA) was employed to obtain a Prony series of the viscoelastic model in terms of experimental data of the complex modulus for COC. To evaluate the elastic recovery of the microstructure, the cross-sectional area of micro-channel before and after hot-imprinting was computed and compared numerically. The simulated results were analysed and clearly showed an improvement in the elastic recovery rate of the microstructure area as the multi-step of rolling was employed.