Abstract
To meet the demand of large motion area and high natural frequency of the micro/nano positioning stage used in fast atomic force microscope(AFM), suitable material, actuator and displacement delivering mechanism were chosen and key factors that affected the performance such as input, output, and coupling displacement, driving force and natural frequency were simulated by finite element method(FEM). Finally, we manufactured the micro/nano positioning XY stage actuated by piezoelectric ceramics driver. Experimental results showed that natural frequency was 1.15kHz, maximum displacement was over 60μm along each axis and coupling rate was below 5%.
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