Abstract
We have created an ionization type Vacuum gauge with sensor element based on an array of vertically aligned carbon nanotubes. Obtained asymmetrical current-voltage characteristics at different voltage polarity on the electrode with the CNTs. It was found that when applying a negative potential on an electrode with the CNTs, the current in the gap is higher than at a positive potential. In the pressure range of 1 ÷ 103 Torr vacuum gauge sensitivity was 6 mV/Torr (at a current of 4.5·10-5 A) and in the range of 10-5 ÷ 1 Torr was 10 mV/Torr (at a current of 1.3·10-5 A). It is shown that the energy efficiency of vacuum gauge can be increased in the case where electrode with CNT operates as an emitter of electrons.
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