Abstract
This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.
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