Electron beam modification of glasses containing Ag and Au nanoparticles

The goal of our work was the investigation of the processes of interaction electrons (5-30 keV) with metal nanoparticles in glasses. The objects of our research were the silicate glasses containing Au and Ag nanoparticles. The experiments have shown that electron irradiation with electron energy 5-10 keV of glass containing Au nanoparticles results in the formation of high reflective gold film about 50 nm thick on a glass surface. Electron irradiation (5-30 keV) of glass containing Ag nanoparticles results in the increase of optical density in the irradiated areas and formation of silver clusters (Ag_x, x<5) in a form of a ring at periphery. Thus, electron beam can be used to produce photonic and plasmonic devices without etching mask.