Generation of line-shaped atmospheric pressure plasma on planar surface with diffuse coplanar surface barrier discharge

A line-shaped uniform atmospheric pressure plasma was generated by diffuse coplanar surface barrier discharge on a planar surface. In this work, the plate is assumed as a wall panel in operation rooms. In the wall panel sample, powered and grounded electrode lines were arranged alternately. Applying an negative high voltage pulse of V=−4 kV and f=13 kHz, a uniform atmospheric pressure plasma was observed between electrodes on the panel surface. The plasma had chemically active species of nitrogen molecule and nitrogen molecule ion which are effective for sterilization.