This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.
Brought to you by:
Paper

The geometric resistivity correction factor for several geometrical samples

© 2015 Chinese Institute of Electronics
, , Citation Serdar Yilmaz 2015 J. Semicond. 36 082001 DOI 10.1088/1674-4926/36/8/082001

1674-4926/36/8/082001

Abstract

This paper reviews the geometric resistivity correction factor of the 4-point probe DC electrical conductivity measurement method using several geometrical samples. During the review of the literature, only the articles that include the effect of geometry on resistivity calculation were considered. Combinations of equations used for various geometries were also given. Mathematical equations were given in the text without details. Expressions for the most commonly used geometries were presented in a table for easy reference.

Export citation and abstract BibTeX RIS

Please wait… references are loading.
10.1088/1674-4926/36/8/082001