Abstract
A source of soft X-ray emission (9–14Å) based on the miniature 15kJ plasma focus was developed and tested. The X-ray emission was channelled along the chamber axis through an opening in the inner electrode (anode). A regime with a mean output of more than 100 J per discharge was found. At a discharge current of 280kA and repetition rate of 3.5Hz achieved by the device, its lifetime was estimated to be 107 commutations (about a year of continuous operation). A demonstration experiment on irradiation of an X-ray resist is discussed.