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Thermal conductivity of BCC-ordered mesoporous silica films

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Published 22 May 2009 2009 IOP Publishing Ltd
, , Citation Sangwoo Shin et al 2009 J. Phys. D: Appl. Phys. 42 125404 DOI 10.1088/0022-3727/42/12/125404

0022-3727/42/12/125404

Abstract

Experimental investigations on thermal conductivity of ordered mesoporous silica films (MSFs) are conducted. Ordered MSFs are prepared using Brij-76 block copolymer. Porosities of ordered MSFs are 30%, 40% and 50% with thicknesses of 162 nm, 192 nm and 177 nm, respectively. Pores with size of a few nanometres are distributed along the entire film in body-centered cubic (BCC) phase. Thermal conductivities of BCC-ordered MSFs are measured using the 3ω method at temperature ranging from room temperature (300 K) to 600 K. Thermal conductivities are measured to be up to several factors higher compared with random porous silicates, which is desirable for effective thermal management in integrated circuits.

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10.1088/0022-3727/42/12/125404