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Scanning electron acoustic microscopy of misfit dislocations in InGaAs/GaAs superlattices

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Published under licence by IOP Publishing Ltd
, , Citation M Urchulutegui et al 1993 J. Phys. D: Appl. Phys. 26 1537 DOI 10.1088/0022-3727/26/9/031

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1 Dpto. Fisica de Mater., Univ. Complutense de Madrid, Spain

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0022-3727/26/9/1537

Abstract

The ability of scanning electron acoustic microscopy (SEAM) to image misfit dislocations in heterostructures is shown in the case of InGaAs/GaAs superlattices. The SEAM images are compared with panchromatic cathodoluminescence (PCL) images of the same samples and the differences are discussed.

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10.1088/0022-3727/26/9/031