Quick search Find article
Quick search
Find article

Nanogap electrodes on Si cantilever for local conductance measurement

M Nagase and H Yamaguchi

Show affiliations


We developed a new nanotool of scanning probe microscopy (SPM) for local conductance measurement. Two Pt electrodes with a nanogap fabricated by focused ion beam (FIB) milling are integrated on a Si cantilever with Al electrodes. The minimum gap fabricated on the cantilever is 20 nm. Local conductance measurements of conductive materials, a carbon film and a gold film, were performed using the nanogap probe on a conventional SPM system. Ohmic contacts between the gap electrodes and the conductive samples were established. The resolution of the conductance image is almost the same as the gap distance of the electrodes. A single gold grain was successfully imaged with sub-100-nm resolution.


PACS

81.07.-b Nanoscale materials and structures: fabrication and characterization

68.37.-d Microscopy of surfaces, interfaces, and thin films

81.16.-c Methods of nanofabrication and processing

73.63.Rt Nanoscale contacts

Subjects

Surfaces, interfaces and thin films

Nanoscale science and low-D systems

Dates

Issue 1 (2007)



View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.