M Nagase and H Yamaguchi 2007 J. Phys.: Conf. Ser. 61 856 doi:10.1088/1742-6596/61/1/171
M Nagase and H Yamaguchi
Show affiliationsWe developed a new nanotool of scanning probe microscopy (SPM) for local conductance measurement. Two Pt electrodes with a nanogap fabricated by focused ion beam (FIB) milling are integrated on a Si cantilever with Al electrodes. The minimum gap fabricated on the cantilever is 20 nm. Local conductance measurements of conductive materials, a carbon film and a gold film, were performed using the nanogap probe on a conventional SPM system. Ohmic contacts between the gap electrodes and the conductive samples were established. The resolution of the conductance image is almost the same as the gap distance of the electrodes. A single gold grain was successfully imaged with sub-100-nm resolution.
81.07.-b Nanoscale materials and structures: fabrication and characterization
68.37.-d Microscopy of surfaces, interfaces, and thin films
Issue 1 (2007)
M Nagase and H Yamaguchi 2007 J. Phys.: Conf. Ser. 61 856
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