Max G Lagally 2007 J. Phys.: Conf. Ser. 61 652 doi:10.1088/1742-6596/61/1/131
Max G Lagally
Show affiliationsVery thin, crystalline semiconductor membranes represent a new nanosystem with very high potential for both technology and novel science. This article reviews aspects of the fabrication and properties of silicon-based nanomembranes and nanowires, including processing, strain engineering, and electronic transport. Particular emphasis is on elastic strain sharing, in which significantly strained single-crystal sheets or novel nanoshapes can be made.
81.07.-b Nanoscale materials and structures: fabrication and characterization
73.40.Qv Metal-insulator-semiconductor structures (including semiconductor-to-insulator)
Issue 1 (2007)
Max G Lagally 2007 J. Phys.: Conf. Ser. 61 652
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