Quick search Find article
Quick search
Find article

Nanofabrication via direct transfer of BOE treated PDMS stamp patterns onto SiO2 surfaces

Yong-Kwan Kim1, Jae-Hyun Park1, Gun-Chul Shin1, Jeong Sook Ha1, So Jeong Park2, Seong Min Yi2 and Gyu Tae Kim2

Show affiliations


Various PDMS patterns with a few microns to sub-micron size and thickness of 20~30 nanometers were successfully transferred on the substrate via simple printing process of a buffered oxide etchant-treated PDMS stamp on the SiO2 substrate. The patterned PDMS layer acted as sacrificial layer for metal-film patterning and as chemical passivation layer for the selective adsorption of V2O5 nanowires. In particular, the electrical measurement of the patterned V2O5 nanowire network showed the semiconducting non-ohmic behavior in the channel.


PACS

81.16.Rf Nanoscale pattern formation

68.43.-h Chemisorption/physisorption: adsorbates on surfaces

73.63.-b Electronic transport in nanoscale materials and structures

Subjects

Surfaces, interfaces and thin films

Nanoscale science and low-D systems

Dates

Issue 1 (2007)



View by subject




Export






Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.