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The potential of highly charged ions: possible future applications

J D Gillaspy1, J M Pomeroy1, A C Perrella1,2 and H Grube1

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This paper mirrors and provides references to an invited review talk delivered by the first author at the 13th International Conference on the Physics of Highly Charged Ions. It briefly updates and extends an earlier review (J. D. Gillaspy, 2001 J. Phys. B: At. Mol. Opt. Phys. 34, R93-R130).


PACS

87.53.Bn Dosimetry/exposure assessment

01.30.Cc Conference proceedings

85.30.-z Semiconductor devices

87.19.X- Diseases

89.20.Bb Industrial and technological research and development

85.40.Hp Lithography, masks and pattern transfer

Subjects

Electronics and devices

Semiconductors

Biological physics

Medical physics

Education and communication

Dates

Issue 1 (2007)



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