International MEMS Conference 2006 Francis E H Tay, Miao Jianmin, John Bergstrom and Ciprian Iliescu doi:10.1088/1742-6596/34/1/E01 Tag this article Abstract

1 Microfabricated platforms for the study of neuronal and cellular networks L Berdondini, S Generelli, T Kraus, O T Guenat, S Koster, V Linder, M Koudelka-Hep and N F de Rooij doi:10.1088/1742-6596/34/1/001 Tag this article Abstract References Full text PDF (488 KB)

7 Proteins as data storage devices: insights from computer models Miguel Ortiz-Lombardía and Chandra S Verma doi:10.1088/1742-6596/34/1/002 Tag this article Abstract References Full text PDF (427 KB)

15 Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation H O Moser, L K Jian, B D F Casse, S P Heussler, M Bahou, M Cholewa, J R Kong, B T Saw, Shahrain bin Mahmood and P Yang doi:10.1088/1742-6596/34/1/003 Tag this article Abstract References Cited by Full text PDF (283 KB)

22 Microablation of gold nanolayers by direct write lithography Prashant D Sawant, Peter Livingston and Dan V Nicolau doi:10.1088/1742-6596/34/1/004 Tag this article Abstract References Full text PDF (177 KB)

28 Electromagnetic modelling of GaAs membrane supported mm-wave receivers D Neculoiu, A Muller and G Konstantinidis doi:10.1088/1742-6596/34/1/005 Tag this article Abstract References Full text PDF (283 KB)

34 Large-scale lithography for sub-500nm features R L Pelzer, T Steininger, Benoit Belier and Gwenaelle Julie doi:10.1088/1742-6596/34/1/006 Tag this article Abstract References Full text PDF (438 KB)

39 A New Test Device for Characterization of Mechanical Stress Caused by Packaging Processes Soeren Hirsch, Steffen Doerner, Peter Hauptmann and Bertram Schmidt doi:10.1088/1742-6596/34/1/007 Tag this article Abstract References Cited by Full text PDF (229 KB)

45 Fabrication of Micromixers Utilizing Shedding Effect Induced by Electrokinetic Instability Lung-Ming Fu, Chang-Hsien Tai, Chine-Hsiung Tsai, Che-Hsin Lin and Chia-Yen Lee doi:10.1088/1742-6596/34/1/008 Tag this article Abstract References Full text PDF (304 KB)

51 Design and Fabrication of 3D-Structured Contactless Capacitive-Type Detector for Capillary Electrophoresis Microchip Chia-Yen Lee, Che-Hsin Lin and Lung-Ming Fu doi:10.1088/1742-6596/34/1/009 Tag this article Abstract References Full text PDF (202 KB)

57 A precision closed-loop driving scheme of silicon micromachined vibratory gyroscope Bo Yang, Bailing Zhou and Shourong Wang doi:10.1088/1742-6596/34/1/010 Tag this article Abstract References Cited by Full text PDF (247 KB)

65 New Results on Plasma Activated Bonding of Imprinted Polymer Features for Bio MEMS Applications P Kettner, R L Pelzer, T Glinsner, S Farrens and D Lee doi:10.1088/1742-6596/34/1/011 Tag this article Abstract References Cited by Full text PDF (534 KB)

72 Haptic Technologies for MEMS Design Mustafa Calis and Marc P Y Desmulliez doi:10.1088/1742-6596/34/1/012 Tag this article Abstract References Full text PDF (163 KB)

76 Silicon-based Packaging Platform with Embedded Solder Interconnections for Light Emitting Diode Chingfu Tsou, Yu-Sheng Huang and Che-Wei Lin doi:10.1088/1742-6596/34/1/013 Tag this article Abstract References Cited by Full text PDF (277 KB)

82 A biodynamic microsystem for fluids viscosity measurements Andrei Marius Avram, Marioara Avram, Adina Bragaru, Roxana Vasilco and Ciprian Iliescu doi:10.1088/1742-6596/34/1/014 Tag this article Abstract References Full text PDF (216 KB)

89 Nonlinear Modeling and Simulation of Thermal Effects in Microcantilever Resonators Dynamic M A Tadayon, H Sayyaadi and G Nakhaie Jazar doi:10.1088/1742-6596/34/1/015 Tag this article Abstract References Cited by Full text PDF (114 KB)

95 Design and fabrication of Electroplating Nickel Micromachined Probe with out-of-plane predeformation Chingfu Tsou, Shuen-Lung Huang, Hung-Chung Li and Teng-Hsien Lai doi:10.1088/1742-6596/34/1/016 Tag this article Abstract References Full text PDF (382 KB)

101 Interface Circuit Design for Frequency-Time Domain MEMS Sensors Sergey Y Yurish and Nikolay V Kirianaki doi:10.1088/1742-6596/34/1/017 Tag this article Abstract References Full text PDF (79 KB)

106 Simulation of Two-Dimensional Unsteady Non-Newtonian Nonisothermal Fluid Flow in Micro Channels H L Zhang, J C Chai and N S Ong doi:10.1088/1742-6596/34/1/018 Tag this article Abstract References Full text PDF (101 KB)

112 A Comparison of Various magnetic thin films for the application of microscale magnetic components David Flynn and Marc Desmulliez doi:10.1088/1742-6596/34/1/019 Tag this article Abstract References Cited by Full text PDF (161 KB)

118 Deformation characterization of a nanoelectromechanical switch Y T Gu and L C Zhang doi:10.1088/1742-6596/34/1/020 Tag this article Abstract References Full text PDF (132 KB)

124 Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor J Aebersold, K Walsh, M Crain, M Voor, M Martin, W Hnat, J Lin, D Jackson and J Naber doi:10.1088/1742-6596/34/1/021 Tag this article Abstract References Cited by Full text PDF (842 KB)

130 A Silicon/glass-based microfluidic device for invetigation of Lagrangian velocity field in microdroplets Nam-Trung Nguyen, Cheng Wang, Teck Neng Wong, Lee Ngo Low and Soon Seng Ho doi:10.1088/1742-6596/34/1/022 Tag this article Abstract References Cited by Full text PDF (182 KB)

136 Micromixer based on Taylor dispersion Yang Huiqian, Nam-Trung Nguyen and Xiaoyang Huang doi:10.1088/1742-6596/34/1/023 Tag this article Abstract References Cited by Full text PDF (777 KB)

142 Design and performance optimization of miniature heat pipes in LTCC Peter Z Shi, K M Chua, Stephen C K Wong and Y M Tan doi:10.1088/1742-6596/34/1/024 Tag this article Abstract References Full text PDF (180 KB)

148 Overview and Improving Fiber Optic Gyroscope Based on MEMS/NEMS Fabrication Bo Zhang and Prof MTE Kahn doi:10.1088/1742-6596/34/1/025 Tag this article Abstract References Cited by Full text PDF (93 KB)

155 Evaluation of bonding between oxygen plasma treated polydimethyl siloxane and passivated silicon K C Tang, E Liao, W L Ong, J D S Wong, A Agarwal, R Nagarajan and L Yobas doi:10.1088/1742-6596/34/1/026 Tag this article Abstract References Cited by Full text PDF (109 KB)

162 Design of microelectromechanical systems for variability via chance-constrained optimization Kan-Lin Hsiung doi:10.1088/1742-6596/34/1/027 Tag this article Abstract References Full text PDF (171 KB)

168 Simulation of Curl Compensation in MEMS Micromirror Adisorn Tuantranont, Karawik Hemarat and Anurat Wisitsoraat doi:10.1088/1742-6596/34/1/028 Tag this article Abstract References Full text PDF (339 KB)

174 Some Design Considerations on the Electrostatically Actuated Fixed-Fixed End Type MEMS Switches Hamed Sadeghian, Ghader Rezazadeh and Ebrahim Abbaspour Sani doi:10.1088/1742-6596/34/1/029 Tag this article Abstract References Cited by Full text PDF (94 KB)

180 A novel method of microneedle array fabrication using inclined deep x-ray exposure Sang Jun Moon, Chun Yan Jin and Seung S Lee doi:10.1088/1742-6596/34/1/030 Tag this article Abstract References Cited by Full text PDF (803 KB)

187 A missing factor in chip-based patch clamp assay: gigaseal Wee-Liat Ong, Levent Yobas and Wei-Yi Ong doi:10.1088/1742-6596/34/1/031 Tag this article Abstract References Cited by Full text PDF (81 KB)

192 Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization M W Chang, T J Gwo, T M Deng and H C Chang doi:10.1088/1742-6596/34/1/032 Tag this article Abstract References Full text PDF (363 KB)

198 Electrochemical Biochip for Drug Screening At Cellular Level Yu Chen, Hui-fang Cui, Jian-shan Ye, Ser-choong Chong, Tit-meng Lim, Fwu-shan Sheu and Wing-cheong Hui doi:10.1088/1742-6596/34/1/033 Tag this article Abstract References Cited by Full text PDF (164 KB)

204 A Fast, Sensitive and Label Free Electrochemical DNA Sensor Yu Chen, Elling, Yoke-ling Lee and Ser-choong Chong doi:10.1088/1742-6596/34/1/034 Tag this article Abstract References Cited by Full text PDF (160 KB)

210 Process Optimization for Monolithic Integration of Piezoresistive Pressure Sensor and MOSFET Amplifier with SOI Approach V Vinoth Kumar, A Dasgupta, K N Bhat and KNatarajan doi:10.1088/1742-6596/34/1/035 Tag this article Abstract References Cited by Full text PDF (104 KB)

216 Sensitivity enhancement of polysilicon piezo-resistive pressure sensors with phosphorous diffused resistors K Sivakumar, N Dasgupta, K N Bhat and K Natarajan doi:10.1088/1742-6596/34/1/036 Tag this article Abstract References Full text PDF (76 KB)

222 PCR thermal management in an integrated Lab on Chip Janak Singh and Mayang Ekaputri doi:10.1088/1742-6596/34/1/037 Tag this article Abstract References Cited by Full text PDF (225 KB)

228 24 GHz RF-MEMS Phase Shifter with Non-Galvanic Electromagnetic Coupling Fabricated in Silicon-Bulk Technology Sebastian Voigt, Stefan Leidich, Wolfram Doetzel, Steffen Kurth and Thomas Gessner doi:10.1088/1742-6596/34/1/038 Tag this article Abstract References Full text PDF (230 KB)

235 Reliability modelling and analysis of thermal MEMS Sylvaine Muratet, Srikanth Lavu, Jean-Yves Fourniols, George Bell and Marc P Y Desmulliez doi:10.1088/1742-6596/34/1/039 Tag this article Abstract References Cited by Full text PDF (155 KB)

241 Simulation of Biosensor using FEM B G Sheeparamatti, M S Hebbal, R B Sheeparamatti, V B Math and J S Kadadevaramath doi:10.1088/1742-6596/34/1/040 Tag this article Abstract References Cited by Full text PDF (163 KB)

247 A Teaching - Learning Framework for MEMS Education B G Sheeparamatti, S A Angadi, R B Sheeparamatti and J S Kadadevaramath doi:10.1088/1742-6596/34/1/041 Tag this article Abstract References Full text PDF (72 KB)

253 Modeling of a new 2D Acceleration Sensor Array using SystemC-AMS Erik Markert, Marco Dienel, Goeran Herrmann, Dietmar Mueller and Ulrich Heinkel doi:10.1088/1742-6596/34/1/042 Tag this article Abstract References Cited by Full text PDF (147 KB)

258 Electro-magnetically Actuated Minute Polymer Pump Fabricated using Packaging Technology G Balaji, A Singh and G K Ananthasuresh doi:10.1088/1742-6596/34/1/043 Tag this article Abstract References Full text PDF (240 KB)

264 Coupled electrostatic-elastic analysis for topology optimization using material interpolation A Alwan and G K Ananthasuresh doi:10.1088/1742-6596/34/1/044 Tag this article Abstract References Full text PDF (360 KB)

271 Plasma Etching of Tapered Features in Silicon for MEMS and Wafer Level Packaging Applications Ha-Duong Ngo, Andre Hiess, Volker Seidemann, Daniel Studzinski, Martin Lange, Jürgen Leib, Dzafir Shariff, Huma Ashraf, Mike Steel, Lilian Atabo and Jon Reast doi:10.1088/1742-6596/34/1/045 Tag this article Abstract References Cited by Full text PDF (405 KB)

277 A novel design and analysis of a MEMS ceramic hot-wire anemometer for high temperature applications N R Nagaiah, A K Sleiti, S Rodriguez, J S Kapat, L An and L Chow doi:10.1088/1742-6596/34/1/046 Tag this article Abstract References Cited by Full text PDF (233 KB)

283 Study of electroosmosis-driven two-liquid displacement flow in a microcapillary Hiong Yap Gan, Chun Yang, Stephen Yee Ming Wan, Gnian Cher Lim and Yee Cheong Lam doi:10.1088/1742-6596/34/1/047 Tag this article Abstract References Full text PDF (304 KB)

291 Numerical study of micro-scale gas flow using finite volume method A Chaudhuri, C Guha and T K Dutta doi:10.1088/1742-6596/34/1/048 Tag this article Abstract References Cited by Full text PDF (178 KB)

297 Parts synthesis approach for 3D integration of MEMS and microsystems leading to system-on-package S K Bhatnagar doi:10.1088/1742-6596/34/1/049 Tag this article Abstract References Full text PDF (122 KB)

304 PZT Actuated Seesaw SPDT RF MEMS Switch Dae-Sung Lee, Suk-Won Jung, Nam-Kyu Cho, Won-Hyo Kim, Woo-Kyeong Seong and Hyo-Derk Park doi:10.1088/1742-6596/34/1/050 Tag this article Abstract References Full text PDF (448 KB)

310 Numerical and experimental investigations of micro air bearings for micro systems Qide Zhang and X C Shan doi:10.1088/1742-6596/34/1/051 Tag this article Abstract References Full text PDF (181 KB)

316 Design, fabrication and characterization of an air-driven micro turbine device X C Shan, Qide Zhang, Yaofeng Sun and Zhenfeng Wang doi:10.1088/1742-6596/34/1/052 Tag this article Abstract References Cited by Full text PDF (299 KB)

322 Electrochemical Characterization of Self-Assembled Monolayers on Semiconducting Substrates for MEMS Applications Sneha A Kulkarni, Imtiaz S Mulla and Kunjukrishna Vijayamohanan doi:10.1088/1742-6596/34/1/053 Tag this article Abstract References Cited by Full text PDF (136 KB)

330 A novel and simple fabrication method of embedded SU-8 micro channels by direct UV lithography C Fu, C Hung and H Huang doi:10.1088/1742-6596/34/1/054 Tag this article Abstract References Cited by Full text PDF (482 KB)

336 Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results D H B Wicaksono, L-J Zhang, G Pandraud, P J French and J F V Vincent doi:10.1088/1742-6596/34/1/055 Tag this article Abstract References Full text PDF (201 KB)

342 Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters P J Stephanou, G Piazza, C D White, M B J Wijesundara and A P Pisano doi:10.1088/1742-6596/34/1/056 Tag this article Abstract References Cited by Full text PDF (381 KB)

350 Simulation and experimental studies of an uncooled MEMS capacitive infrared detector for thermal imaging Weidong Wang, Vandana Upadhyay, John Bumgarner and Oliver Edwards doi:10.1088/1742-6596/34/1/057 Tag this article Abstract References Full text PDF (329 KB)

356 Microfluidic transport by AC electroosmosis Nazmul Islam and Jie Wu doi:10.1088/1742-6596/34/1/058 Tag this article Abstract References Cited by Full text PDF (223 KB)

362 Self-actuating biosensor using a piezoelectric cantilever and its optimization Il-Han Hwang and Jong-Hyun Lee doi:10.1088/1742-6596/34/1/059 Tag this article Abstract References Full text PDF (297 KB)

368 Micro- and nano- patterning using imprinting technique Haijing Lu, X C Shan, Yaofeng Sun, Sum Huan Ng and Albert C W Lu doi:10.1088/1742-6596/34/1/060 Tag this article Abstract References Cited by Full text PDF (295 KB)

373 Realization of a microelectrofluidic platform S H Ng, Z F Wang, Z F Shi, R T Tjeung and B K Lok doi:10.1088/1742-6596/34/1/061 Tag this article Abstract References Cited by Full text PDF (204 KB)

379 Design optimization by numerical characterization of fluid flow through the valveless diffuser micropumps M T Ahmadian and Amin Mehrabian doi:10.1088/1742-6596/34/1/062 Tag this article Abstract References Cited by Full text PDF (274 KB)

385 Electrokinetic Flow in Microchannels with Finite Reservoir Size Effects Deguang Yan, Chun Yang, Nam-Trung Nguyen and Xiaoyang Huang doi:10.1088/1742-6596/34/1/063 Tag this article Abstract References Full text PDF (322 KB)

393 Fabrication of capacitive absolute pressure sensor using Si-Au eutectic bonding in SOI wafer Kang Ryeol Lee, Kunnyun Kim, Hyo-Derk Park, Yong Kook Kim, Seung-Woo Choi and Woo-Beom Choi doi:10.1088/1742-6596/34/1/064 Tag this article Abstract References Full text PDF (224 KB)

399 A silicon-based flexible tactile sensor for ubiquitous robot companion applications Kunnyun Kim, Kang Ryeol Lee, Dae Sung Lee, Nam-Kyu Cho, Won Hyo Kim, Kwang-Bum Park, Hyo-Derk Park, Yong Kook Kim, Yon-Kyu Park and Jong-Ho Kim doi:10.1088/1742-6596/34/1/065 Tag this article Abstract References Cited by Full text PDF (238 KB)

404 Integration of indium phosphide thin film structures on silicon substrates by direct wafer bonding J Arokiaraj, S Vicknesh and A Ramam doi:10.1088/1742-6596/34/1/066 Tag this article Abstract References Cited by Full text PDF (173 KB)

410 Development of scanning micromirror with discrete steering angles Z F Wang, W Noell, M Zickar, N F de Rooij and S P Lim doi:10.1088/1742-6596/34/1/067 Tag this article Abstract References Cited by Full text PDF (518 KB)

417 A numerical model for etching through a circular hole P Rath, J C Chai, H Zheng, Y C Lam and V M Murukeshan doi:10.1088/1742-6596/34/1/068 Tag this article Abstract References Full text PDF (112 KB)

423 Self-Assembly Carbon Nanotubes on Cantilever Biosensor for Sensitivity Enhancement Johnny H He, Shao-qing Sun, Jian-Shan Ye and Tit Meng Lim doi:10.1088/1742-6596/34/1/069 Tag this article Abstract References Cited by Full text PDF (280 KB)

429 High sensitivity piezoresistive cantilever sensor for biomolecular detection Johnny H HE and Yong Feng LI doi:10.1088/1742-6596/34/1/070 Tag this article Abstract References Cited by Full text PDF (142 KB)

436 Modelling & Simulation of Novel Three Arm MEMS Actuators & Its Application Jagadeesh Pandiyan, M Umapathy, S Balachandar, M Arumugam, S Ramasamy and Nilesh C Gajjar doi:10.1088/1742-6596/34/1/071 Tag this article Abstract References Full text PDF (525 KB)

442 Design of Industrial Vibration Transmitter Using MEMS Accelerometer Jagadeesh Pandiyan, M Umapathy, S Balachandar, M Arumugam, S Ramasamy and Nilesh C Gajjar doi:10.1088/1742-6596/34/1/072 Tag this article Abstract References Cited by Full text PDF (152 KB)

448 Flow of Cells in Microchannels Y F YAP, D Li and J C CHAI doi:10.1088/1742-6596/34/1/073 Tag this article Abstract References Full text PDF (102 KB)

454 An Improved Chemical Resistance and Mechanical Durability of Hydrophobic FDTS Coatings B Kobrin, T Zhang, M T Grimes, K Chong, M Wanebo, J Chinn and R Nowak doi:10.1088/1742-6596/34/1/074 Tag this article Abstract References Cited by Full text PDF (66 KB)

458 Novel polymer derived ceramic-high temperature heat flux sensor for gas turbine environment N R Nagaiah, J S Kapat, L An and L Chow doi:10.1088/1742-6596/34/1/075 Tag this article Abstract References Cited by Full text PDF (204 KB)

464 Design and Simulation of a New Decoupled Micromachined Gyroscope Abdelhameed Sharaf, Sherif Sedky and S E-D Habib doi:10.1088/1742-6596/34/1/076 Tag this article Abstract References Full text PDF (188 KB)

470 Theoretical investigation of two-fluid electroosmotic flow in microchannels Y Gao, T N Wong, C Yang, N T Nguyen, K T Ooi and C Wang doi:10.1088/1742-6596/34/1/077 Tag this article Abstract References Full text PDF (83 KB)

475 A new device with PZT ultrasonic transducers in MEMS technology Soeren Hirsch, Steffen Doerner, Stefan Schimpf, Ralf Lucklum, Peter Hauptmann and Bertram Schmidt doi:10.1088/1742-6596/34/1/078 Tag this article Abstract References Full text PDF (962 KB)

481 High Productivity DRIE solutions for 3D-SiP and MEMS Volume Manufacturing M Puech, JM Thevenoud, N Launay, N Arnal, P Godinat, B Andrieu and JM Gruffat doi:10.1088/1742-6596/34/1/079 Tag this article Abstract References Cited by Full text PDF (98 KB)

487 An adjustable synthetic jet by a novel PZT-driven actuator with a slide block Zhen-bing Luo, Zhi-xun Xia and Bing Liu doi:10.1088/1742-6596/34/1/080 Tag this article Abstract References Full text PDF (409 KB)

493 Modified Model for Sacrificial Layer Etching Chang-ju Wu, Hui-lian Ma, Yue-lin Wang and Zhong-he Jin doi:10.1088/1742-6596/34/1/081 Tag this article Abstract References Full text PDF (249 KB)

500 A Comparison Simulation of Fixed-fixed Type MEMS Switches G Rezazadeh, H Sadeghian and E Malekpour doi:10.1088/1742-6596/34/1/082 Tag this article Abstract References Full text PDF (164 KB)

506 UV curing imprint lithography for micro-structure in MEMS manufacturing Yucheng Ding, Hongzhong Liu, Bingheng Lu and Zhihui Qiu doi:10.1088/1742-6596/34/1/083 Tag this article Abstract References Full text PDF (503 KB)

511 The ICP etching technology of 3C-SiC films Ning Jin, Gong Quancheng, Sun Guosheng and Liu Zhongli doi:10.1088/1742-6596/34/1/084 Tag this article Abstract References Cited by Full text PDF (311 KB)

516 Measurement of material properties of individual layers for composite films by a pull-in method Meng Nie, Qing-An Huang and Weihua Li doi:10.1088/1742-6596/34/1/085 Tag this article Abstract References Cited by Full text PDF (690 KB)

522 Simulations for Surface Evolvement and Footing Effect in ICP DRIE Fabrications Jian Zhang, Qing-An Huang and Wei-Hua Li doi:10.1088/1742-6596/34/1/086 Tag this article Abstract References Full text PDF (381 KB)

527 Continuous Electrodeless Dielectrophoretic Separation in a Circular Channel L Zhang, F Tatar, P Turmezei, J Bastemeijer, J R Mollinger, O Piciu and A Bossche doi:10.1088/1742-6596/34/1/087 Tag this article Abstract References Cited by Full text PDF (439 KB)

533 3D Ceramic Microfluidic Device Manufacturing Govindarajan Natarajan and James N Humenik doi:10.1088/1742-6596/34/1/088 Tag this article Abstract References Cited by Full text PDF (688 KB)

540 Influence of The Sticking Effect on The Contact Resistance of a MEMS DC-Contact Switch Jian-Qiu Huang and Qing-An Huang doi:10.1088/1742-6596/34/1/089 Tag this article Abstract References Cited by Full text PDF (126 KB)

546 A Novel Micromachined Microwave Power Sensor Using GaAs MMIC Process Lei Han, Qing-An Huang and Xiaoping Liao doi:10.1088/1742-6596/34/1/090 Tag this article Abstract References Cited by Full text PDF (102 KB)

552 A new micro-rotating structure Zu-Tao Liu, Qing-An Huang and Wei-Hua Li doi:10.1088/1742-6596/34/1/091 Tag this article Abstract References Full text PDF (328 KB)

558 A Nodal Analysis Method for Laterally-Driven Electrothermal Microacutators Ren-Gang Li, Qing-An Huang and Weihua Li doi:10.1088/1742-6596/34/1/092 Tag this article Abstract References Full text PDF (140 KB)

564 PDMS Based Thermopnuematic Peristaltic Micropump for Microfluidic Systems W Mamanee, A Tuantranont, N V Afzulpurkar, N Porntheerapat, S Rahong and A Wisitsoraat doi:10.1088/1742-6596/34/1/093 Tag this article Abstract References Cited by Full text PDF (200 KB)

570 A Cell Library Methodology for Co-Design of MEMS Package-Device Jing Song, Jie-Ying Tang and Qing-An Huang doi:10.1088/1742-6596/34/1/094 Tag this article Abstract References Full text PDF (108 KB)

577 Effect of SF₆ flow rate on the etched surface profile and bottom grass formation in deep reactive ion etching process Pradeep Dixit and Jianmin Miao doi:10.1088/1742-6596/34/1/095 Tag this article Abstract References Cited by Full text PDF (246 KB)

583 Dynamic Behavior Analysis of Compliant Micromechanisms Mehdi Rezaei, Mohsen Tayefeh and Mohsen Bahrami doi:10.1088/1742-6596/34/1/096 Tag this article Abstract References Full text PDF (170 KB)

589 Particle Line Assembly/Patterning by Microfluidic AC Electroosmosis Meng Lian, Nazmul Islam and Jie Wu doi:10.1088/1742-6596/34/1/097 Tag this article Abstract References Cited by Full text PDF (636 KB)

595 Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT) S A Anbalagan, G Uma and M Umapathy doi:10.1088/1742-6596/34/1/098 Tag this article Abstract References Cited by Full text PDF (294 KB)

601 Design and Simulation of MEMS Devices using Interval Analysis M Shanmugavalli, G Uma, B Vasuki and M Umapathy doi:10.1088/1742-6596/34/1/099 Tag this article Abstract References Cited by Full text PDF (128 KB)

606 Dynamic modeling of geometrically nonlinear electrostatically actuated microbeams (Corotational Finite Element formulation and analysis) H Borhan and M T Ahmadian doi:10.1088/1742-6596/34/1/100 Tag this article Abstract References Cited by Full text PDF (430 KB)

614 Postbuckling analysis of a thermally driven microbeam under realistic conditions Mohsen Tayefeh and Mohsen Bahrami doi:10.1088/1742-6596/34/1/101 Tag this article Abstract References Full text PDF (154 KB)

620 Design and Modelling of a Microfluidic Electro-Lysis Device with Controlling Plates A Jenkins, C P Chen, S Spearing, L A Monaco, A Steele and and G Flores doi:10.1088/1742-6596/34/1/102 Tag this article Abstract References Full text PDF (249 KB)

626 Microfluidic design for bio-sample delivery to silicon nanowire biosensor - a simulation study S J Tan, I K Lao, H M Ji, A Agarwal, N Balasubramanian and D L Kwong doi:10.1088/1742-6596/34/1/103 Tag this article Abstract References Cited by Full text PDF (179 KB)

631 Magnetically actuated microvalve for active flow control Ducloux Olivier, Talbi Abdelkrim, Deblock Yves, Gimeno Leticia, Tiercelin Nicolas, Pernod Philippe, Preobrazhensky Vladimir and Merlen Alain doi:10.1088/1742-6596/34/1/104 Tag this article Abstract References Cited by Full text PDF (469 KB)

637 Vibrotactile using micromachined electromagnetic actuators array A Talbi, O Ducloux, N Tiercelin, Y Deblock, P Pernod and V Preobrazhensky doi:10.1088/1742-6596/34/1/105 Tag this article Abstract References Full text PDF (317 KB)

643 Design and Simulation of Electro-fabricated MEMS Microhotplate for Gas Sensor Applications A Wisitsoraat, A Tuantranont and T Lomas doi:10.1088/1742-6596/34/1/106 Tag this article Abstract References Full text PDF (310 KB)

650 The Movement of Micro Droplet with the Effects of Dielectric Layer and Hydrophobic Surface Treatment with R.F. Atmospheric Plasma in EWOD Structure Nah-Young Kim, Sung-Min Hong, Soon-Sup Park and Young-Pyo Hong doi:10.1088/1742-6596/34/1/107 Tag this article Abstract References Cited by Full text PDF (263 KB)

656 Hydrophilic Surface Modification of PDMS Using Atmospheric RF Plasma Sung M Hong, Seong H Kim, and Jeong H Kim and Hak I Hwang doi:10.1088/1742-6596/34/1/108 Tag this article Abstract References Cited by Full text PDF (241 KB)

662 Initial Test Results from a 3-axis Vibrating Ring Gyroscope B J Gallacher, J A Neasham, J S Burdess and A J Harris doi:10.1088/1742-6596/34/1/109 Tag this article Abstract References Cited by Full text PDF (278 KB)

668 Solidly mounted resonators aging under harsh environmental conditions B Ivira, R Y Fillit, F Ndagijimana, Ph Benech, J Boussey, G Parat and P Ancey doi:10.1088/1742-6596/34/1/110 Tag this article Abstract References Full text PDF (267 KB)

674 A 3-D Simulator for Silicon Anisotropic Wet Chemical Etching Process Based on Cellular Automata Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li and Chi Zhu doi:10.1088/1742-6596/34/1/111 Tag this article Abstract References Cited by Full text PDF (312 KB)

680 A novel integrated spatial filtering detector chip with variable multi-valued weighting functions H M Go and S Ohyama doi:10.1088/1742-6596/34/1/112 Tag this article Abstract References Full text PDF (605 KB)

686 Designing H-shaped micromechanical filters O P Arhaug and O Soeraasen doi:10.1088/1742-6596/34/1/113 Tag this article Abstract References Cited by Full text PDF (135 KB)

692 Stochastic estimation of microactuator buckling Mohsen Bahrami and Mohsen Tayefeh doi:10.1088/1742-6596/34/1/114 Tag this article Abstract References Full text PDF (230 KB)

698 Recent advances in automated system model extraction (SME) Nithin Narayanan, John Bloomsburgh, Yie He, Jianhua Mao, Mahesh B Patil and Sandeep Akkaraju doi:10.1088/1742-6596/34/1/115 Tag this article Abstract References Full text PDF (302 KB)

704 Electro Hydrodynamic Pumping of Liquids in Microchannels Nithin Narayanan, Sandeep Akkaraju, John Bloomsburgh and Lei Zhou doi:10.1088/1742-6596/34/1/116 Tag this article Abstract References Cited by Full text PDF (377 KB)

709 Parallel Plate Particle Trapping with Application to Cantilevers Jie (Jayne) Wu doi:10.1088/1742-6596/34/1/117 Tag this article Abstract References Full text PDF (627 KB)

715 Modeling and simulation of multiport RF switch J Vijay, Ivan Saha, G Uma and M Umapathy doi:10.1088/1742-6596/34/1/118 Tag this article Abstract References Full text PDF (173 KB)

722 Design steps for bulk micro machined single axis silicon capacitive accelerometer with optimised device dimensions Vivek Agarwal, Tarun K Bhattacharayya and Subhadeep Banik doi:10.1088/1742-6596/34/1/119 Tag this article Abstract References Cited by Full text PDF (80 KB)

728 Robust sliding-mode control of a MEMS optical switch Behrouz Ebrahimi and Mohsen Bahrami doi:10.1088/1742-6596/34/1/120 Tag this article Abstract References Cited by Full text PDF (172 KB)

734 A Low Temperature Co-Fired Ceramic Mesofluidic Separator Jijun Zhu, Jia Cheng and Simon S Ang doi:10.1088/1742-6596/34/1/121 Tag this article Abstract References Cited by Full text PDF (212 KB)

740 Design, Fabrication and Characterization of an In Silico Cell Physiology lab for Bio Sensing Applications A ul Haque, M Rokkam, A R De Carlo, S T Wereley, H W Wells, W T McLamb, S J Roux, P P Irazoqui and D M Porterfield doi:10.1088/1742-6596/34/1/122 Tag this article Abstract References Cited by Full text PDF (570 KB)

747 Three-dimensional (3D) extra-cellular matrix coating of a microfluidic device K C Chaw, M Manimaran, Francis E H Tay and S Swaminathan doi:10.1088/1742-6596/34/1/123 Tag this article Abstract References Full text PDF (1.20 MB)

752 Construction of Physics-Based Atlas and its application in Brain Deformation Analysis A Roy, W L Nowinski and F E H Tay doi:10.1088/1742-6596/34/1/124 Tag this article Abstract References Full text PDF (1020 KB)

757 Design, modelling and simulation of vibratory micromachined gyroscopes Suhas Mohite, Nishad Patil and Rudra Pratap doi:10.1088/1742-6596/34/1/125 Tag this article Abstract References Cited by Full text PDF (730 KB)

764 A new fabrication method for low stress PECVD - SiN_x layers Poh Lam Ong, Jiashen Wei, Francis E H Tay and Ciprian Iliescu doi:10.1088/1742-6596/34/1/126 Tag this article Abstract References Cited by Full text PDF (315 KB)

770 A new passive telemetry LC pressure and temperature sensor optimized for TPMS M Nabipoor and B Y Majlis doi:10.1088/1742-6596/34/1/127 Tag this article Abstract References Cited by Full text PDF (252 KB)

776 Adhesive bonding with SU-8 at wafer level for microfluidic devices Liming Yu, Francis E H Tay, Guolin Xu, Bangtao Chen, Marioara Avram and Ciprian Iliescu doi:10.1088/1742-6596/34/1/128 Tag this article Abstract References Cited by Full text PDF (253 KB)

782 The signal detection for the levitated rotor micro gyroscope Huang Xiaogang, Chen Wenyuan, Liu Wu, Zhang Weiping and Wu Xiaosheng doi:10.1088/1742-6596/34/1/129 Tag this article Abstract References Full text PDF (171 KB)

788 Variable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers Y Q Fu, S B Milne, J K Luo, A J Flewitt, L Wang, J M Miao and W I Milne doi:10.1088/1742-6596/34/1/130 Tag this article Abstract References Full text PDF (248 KB)

794 Development of thermal actuators with multi-locking positions J K Luo, Y Zhu, Y Q Fu, A J Flewitt, S M Spearing, J M Miao and W I Milne doi:10.1088/1742-6596/34/1/131 Tag this article Abstract References Full text PDF (266 KB)

800 Design and fabrication of a micro zinc/air battery L Fu, J K Luo, J E Huber and T J Lu doi:10.1088/1742-6596/34/1/132 Tag this article Abstract References Full text PDF (194 KB)

806 Quantification of human immunoglobulin G immobilized on gold-coated silicon chip for biosensing applications S K Vashist, R Raiteri, R Tewari, R P Bajpai and L M Bharadwaj doi:10.1088/1742-6596/34/1/133 Tag this article Abstract References Cited by Full text PDF (592 KB)

812 Process Analysis and Optimization on PECVD Amorphous Silicon on Glass Substrate Yan Ying Ong, Bang Tao Chen, Francis E H Tay and Ciprian Iliescu doi:10.1088/1742-6596/34/1/134 Tag this article Abstract References Cited by Full text PDF (268 KB)

818 Characterization of stiction effects of an electrostatic micro positioner for probe storage Mihai Patrascu, Stefano Stramigioli Senior Member, IEEE doi:10.1088/1742-6596/34/1/135 Tag this article Abstract References Full text PDF (514 KB)

824 Carbon nanotube as NEMS sensor - effect of chirality and stone-wales defect intend V Gayathri and R Geetha doi:10.1088/1742-6596/34/1/136 Tag this article Abstract References Cited by Full text PDF (247 KB)

829 Computational studies of the EDL effect in 3-D developing flow in microchannel S T Tan and E Y K Ng doi:10.1088/1742-6596/34/1/137 Tag this article Abstract References Full text PDF (188 KB)

834 Predicting the effects of dimensional and material stiffness variations on a compliant bistable microrelay performance Ali Ghanbari and Mohsen Bahrami doi:10.1088/1742-6596/34/1/138 Tag this article Abstract References Full text PDF (125 KB)

840 A two-stage topological optimum design for monolithic compliant microgripper integrated with flexure hinges C J Shih and C F Lin doi:10.1088/1742-6596/34/1/139 Tag this article Abstract References Cited by Full text PDF (348 KB)

847 Enhanced analytical model for micromachined microphones Chee Wee Tan and Jianmin Miao doi:10.1088/1742-6596/34/1/140 Tag this article Abstract References Full text PDF (102 KB)

853 Development of an Integrated Polymer Microfluidic Stack Proyag Datta, Jens Hammacher, Mark Pease, Sitanshu Gurung and Jost Goettert doi:10.1088/1742-6596/34/1/141 Tag this article Abstract References Cited by Full text PDF (567 KB)

859 Fabrication of a Si stencil mask for the X-ray lithography using a dry etching technique Harutaka Mekaru, Takayuki Takano, Koichi Awazu and Ryutaro Maeda doi:10.1088/1742-6596/34/1/142 Tag this article Abstract References Cited by Full text PDF (472 KB)

865 Activities of LIGA and Nano LIGA Technologies at BSRF F Yi, J Zhang, C Xie, D Wang and D Chen doi:10.1088/1742-6596/34/1/143 Tag this article Abstract References Cited by Full text PDF (404 KB)

870 Fabrication of LIGA mold insert using Ni-PTFE composite micro-electroforming Yuhua Guo, Gang Liu, Ying Xiong, Xuelin Zhu, Wang Jun and Yangchao Tian doi:10.1088/1742-6596/34/1/144 Tag this article Abstract References Cited by Full text PDF (470 KB)

875 Fabrication of PMMA Microchip of Capillary Electrophoresis by Optimized UV-LIGA Process Xuelin Zhu, Gang Liu, Ying Xiong, Yuhua Guo and Yangchao Tian doi:10.1088/1742-6596/34/1/145 Tag this article Abstract References Cited by Full text PDF (184 KB)

880 Fabrication of the three-dimensional solenoid type micro magnetic sensor Yiming Wang, Gang Liu, Yin Xiong, Jianzhong Yang and Yangchao Tian doi:10.1088/1742-6596/34/1/146 Tag this article Abstract References Full text PDF (190 KB)

885 Fabrication of 2D and 3D Electromagnetic Metamaterials for the Terahertz Range. B D F Casse, H O Moser, L K Jian, M Bahou, O Wilhelmi, B T Saw and P D Gu doi:10.1088/1742-6596/34/1/147 Tag this article Abstract References Cited by Full text PDF (452 KB)

891 Industrial applications of micro/nanofabrication at Singapore Synchrotron Light Source L K Jian, B D F Casse, S P Heussler, J R Kong, B T Saw, Shahrain bin Mahmood and H O Moser doi:10.1088/1742-6596/34/1/148 Tag this article Abstract References Full text PDF (328 KB)

897 Fabrication of Nanoimprint stamps for photonic crystals Kouba J, Kubenz M, Mai A, Ropers G, Eberhardt W and Loechel B doi:10.1088/1742-6596/34/1/149 Tag this article Abstract References Cited by Full text PDF (1.36 MB)

904 Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies. F Romanato, L Businaro, M Tormen, F Perennes, M Matteucci, B Marmiroli, S Balslev and E Di Fabrizio doi:10.1088/1742-6596/34/1/150 Tag this article Abstract References Cited by Full text PDF (1.03 MB)

912 LiGA Research and Service at CAMD Jost Goettert, Proyag Datta, Yohannes Desta, Yoonyoung Jin, Zhong-geng Ling and Varshni Singh doi:10.1088/1742-6596/34/1/151 Tag this article Abstract References Cited by Full text PDF (1.13 MB)

919 Analysis of Quality Design Techniques for Electrostatic Actuators H Sadeghian and A Doniavi doi:10.1088/1742-6596/34/1/152 Tag this article Abstract References Full text PDF (480 KB)

925 Joule heating and its effects on electroosmotic flow in microfluidic channels G Y Tang, D G Yan, C Yang, H Q Gong, C J Chai and Y C Lam doi:10.1088/1742-6596/34/1/153 Tag this article Abstract References Cited by Full text PDF (454 KB)

931 Forced response of electrostatic harmonic drive to torque fluctuation Lizhong Xu Cuirong Zhu and Lei Qin doi:10.1088/1742-6596/34/1/154 Tag this article Abstract References Full text PDF (221 KB)

937 Spray Coating of Photoresist for 3D Microstructures with Different Geometries Liming Yu, Yong Yeow Lee, Francis E H Tay and Ciprian Iliescu doi:10.1088/1742-6596/34/1/155 Tag this article Abstract References Cited by Full text PDF (270 KB)

943 Wafer Bonding Techniques for Microsystem Packaging J Wei doi:10.1088/1742-6596/34/1/156 Tag this article Abstract References Cited by Full text PDF (96 KB)

949 Characterisation and Modelling of MEMS Ultrasonic Transducers M F Teng and A J Hariz doi:10.1088/1742-6596/34/1/157 Tag this article Abstract References Full text PDF (281 KB)

955 Development of A MEMS Based Manometric Catheter for Diagnosis of Functional Swallowing Disorders. H Y Hsu, A J Hariz, T Omari, M F Teng, D Sii, S Chan, L Lau, S Tan, G Lin, M Haskard, D Mulcahy and M Bakewell doi:10.1088/1742-6596/34/1/158 Tag this article Abstract References Full text PDF (112 KB)

961 Nonlinear Dynamics of MicroResonators M A Tadayon, M Rajaei, H Sayyaadi, G Nakhaie Jazar and A Alasty doi:10.1088/1742-6596/34/1/159 Tag this article Abstract References Full text PDF (229 KB)

967 Sample transport with thermocapillary force for microfluidics Nam-Trung Nguyen, Wai Wah Pang and Xiaoyang Huang doi:10.1088/1742-6596/34/1/160 Tag this article Abstract References Cited by Full text PDF (361 KB)

973 Research on low-temperature anodic bonding using induction heating Mingxiang Chen, Xinjian Yi, Liulin Yuan and Sheng Liu doi:10.1088/1742-6596/34/1/161 Tag this article Abstract References Cited by Full text PDF (267 KB)

979 Microfabrication of PZT force sensors for minimally invasive surgical tools S Ezhilvalavan, Zaoli Zhang, Jeremy Loh and Jackie Y Ying doi:10.1088/1742-6596/34/1/162 Tag this article Abstract References Full text PDF (265 KB)

985 Modelling of the human brain with detailed anatomy for numerical simulation of surgical interventions Chunping Gao, Francis Eng Hock Tay and Wieslaw L Nowinski doi:10.1088/1742-6596/34/1/163 Tag this article Abstract References Full text PDF (302 KB)

990 Optimized Design of High Sensitivity Micromechanical Photon Detectors Zhang Liuqiang, Den Daiwei and Wang Qiang doi:10.1088/1742-6596/34/1/164 Tag this article Abstract References Full text PDF (248 KB)

996 A novel optical fibers MEMS pressure sensor Ni xiao-qi, Wang Ming, Chen Xu-xing, Ge yi-xian and Rong Hua doi:10.1088/1742-6596/34/1/165 Tag this article Abstract References Full text PDF (193 KB)

1002 High Performance Microaccelerometer with Wafer-level Hermetic Packaged Sensing Element and Continuous-time BiCMOS Interface Circuit Hyoungho Ko, Sangjun Park, Seung-Joon Paik, Byoung-doo Choi, Yonghwa Park, Sangmin Lee, Sungwook Kim, Sang Chul Lee, Ahra Lee, Kwangho Yoo, Jaesang Lim and Dong-il "Dan" Cho doi:10.1088/1742-6596/34/1/166 Tag this article Abstract References Cited by Full text PDF (297 KB)

1008 A 3-D Microelectrode System for Dielectrophoretic Manipulation of Microparticles D F Chen, H Du, H Q Gong and W H Li doi:10.1088/1742-6596/34/1/167 Tag this article Abstract References Cited by Full text PDF (181 KB)

1014 A continuous-time capacitance to voltage converter for microcapacitive pressure sensors Shao Lichun, Moorthi Palaniapan and Tan Woei Wan doi:10.1088/1742-6596/34/1/168 Tag this article Abstract References Full text PDF (94 KB)

1020 Modeling and Simulation of the Microgyroscope Driving Loop using SPICE Ahra Lee, Hyoungho Ko, Yonghwa Park, Kwangho Yoo, Sung Wook Kim, Sang Chul Lee, Jae-sang Lim, Taedong Ahn, Deog-Kyoon Jeong, Hyun-Su Jang, Min Ha Park and Dongil "Dan" Cho doi:10.1088/1742-6596/34/1/169 Tag this article Abstract References Cited by Full text PDF (183 KB)

1026 Development of electrothermal actuation based planar variable optical attenuators (VOAs) Chengkuo Lee and J Andrew Yeh doi:10.1088/1742-6596/34/1/170 Tag this article Abstract References Full text PDF (519 KB)

1032 Stepper Motor Actuated Microvalve Imran Fazal, Marcus Louwerse, Henri Jansen and Miko Elwenspoek doi:10.1088/1742-6596/34/1/171 Tag this article Abstract References Cited by Full text PDF (252 KB)

1038 Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties Q D Nguyen and M Elwenspoek doi:10.1088/1742-6596/34/1/172 Tag this article Abstract References Cited by Full text PDF (311 KB)

1044 Optimized design of a micromachined G-switch based on contactless configuration for health care applications Andojo Ongkodjojo and Francis E H Tay doi:10.1088/1742-6596/34/1/173 Tag this article Abstract References Cited by Full text PDF (152 KB)

1053 Behavioural modelling and system-level simulation of micromechanical beam resonators Lynn Khine and Moorthi Palaniapan doi:10.1088/1742-6596/34/1/174 Tag this article Abstract References Full text PDF (186 KB)

1059 Garment-based detection of falls and activities of daily living using 3-axis MEMS accelerometer M N Nyan, Francis E H Tay, M Manimaran and K H W Seah doi:10.1088/1742-6596/34/1/175 Tag this article Abstract References Cited by Full text PDF (366 KB)

1068 MEMSWear - Biomonitoring - Incorporating sensors into smart shirt for wireless sentinel medical detection and alarm Samuel Ng Choon Po, Guo Dagang, Mohammad Dzulkifli Bin Mohyi Hapipi and Francis Tay Eng Hock doi:10.1088/1742-6596/34/1/176 Tag this article Abstract References Cited by Full text PDF (130 KB)

1073 Design and Optimization of Dual Optical Fiber MEMS Pressure Sensor For Biomedical Applications Guo Dagang, Samuel Ng Choon Po, Francis Tay Eng Hock and Lin Rongming doi:10.1088/1742-6596/34/1/177 Tag this article Abstract References Full text PDF (279 KB)

1079 Overview of MEMSWear II - Incorporating MEMS Technology into smart shirt for Geriatric care Samuel Ng Choon Po, Guo Dagang, Mohammad Dzulkifli Bin Mohyi Hapipi, Nyan Myo Naing, Wei Jia Shen, Andojo Ongkodjojo and Francis Tay Eng Hock doi:10.1088/1742-6596/34/1/178 Tag this article Abstract References Cited by Full text PDF (120 KB)

1086 Design and fabrication of miniature combination lock Gao Yang and Su Wei doi:10.1088/1742-6596/34/1/179 Tag this article Abstract References Full text PDF (217 KB)

1092 Multibeam Electron Source using MEMS Electron Optical Components B van Someren, M J van Bruggen, Y Zhang, C W Hagen and P Kruit doi:10.1088/1742-6596/34/1/180 Tag this article Abstract References Cited by Full text PDF (263 KB)

1098 A Signal Processing Module for the Analysis of Heart Sounds and Heart Murmurs Faizan Javed, P A Venkatachalam and Ahmad Fadzil M H doi:10.1088/1742-6596/34/1/181 Tag this article Abstract References Cited by Full text PDF (185 KB)

1106 Design and Fabrication a Microfluidic Device for Fetal Cells Dielectrophoretic Properties Characterization Guolin Xu, M B Chan, Charles Yang, P Sukumar, M Choolani and Jackie Y Ying doi:10.1088/1742-6596/34/1/182 Tag this article Abstract References Cited by Full text PDF (318 KB)

1112 Design and Fabrication of a Flow Delivery Microdevice with Asymmetric Microelectrodes Pairs Hong Kiat Tay, Daniel Lee, Guolin Xu and Chun Yang doi:10.1088/1742-6596/34/1/183 Tag this article Abstract References Cited by Full text PDF (254 KB)

1117 The Influence of Stress Gradient on the Pull-in Phenomena of Microelectromechanical Switches H Sadeghian and Gh Rezazadeh doi:10.1088/1742-6596/34/1/184 Tag this article Abstract References Cited by Full text PDF (307 KB)

1123 Pull-In Phenomenon Investigation of Nanoelectromechanical Systems H Sadeghian, Gh Rezazadeh and Ehsan Malekpour doi:10.1088/1742-6596/34/1/185 Tag this article Abstract References Cited by Full text PDF (104 KB)

1127 Microfabricated Silicon Microneedle Array for Transdermal Drug Delivery Jing Ji, Francis Eh Tay, Jianmin Miao and Ciprian Iliescu doi:10.1088/1742-6596/34/1/186 Tag this article Abstract References Cited by Full text PDF (415 KB)

1132 Microfabricated hollow microneedle array using ICP etcher Jing Ji, Francis E H Tay and Jianmin Miao doi:10.1088/1742-6596/34/1/187 Tag this article Abstract References Cited by Full text PDF (312 KB)

1137 Characterization of silicon isotropic etch by inductively coupled plasma etcher for microneedle array fabrication Jing Ji, Francis E H Tay, Jianmin Miao and Jianbo Sun doi:10.1088/1742-6596/34/1/188 Tag this article Abstract References Full text PDF (137 KB)

1143 Cell Deformation in Cancer Metastasis: a BioMEMS Based Approach M Manimaran, Francis E H Tay and K C Chaw doi:10.1088/1742-6596/34/1/189 Tag this article Abstract References Cited by Full text PDF (160 KB)