Masahide Tona and Satoshi Takahashi 2004 J. Phys.: Conf. Ser. 2 57 doi:10.1088/1742-6596/2/1/008
Masahide Tona1 and Satoshi Takahashi2
Show affiliationsWe report present status of a beam line for transportation of highly charged ions (HCIs) extracted from the Tokyo EBIT. We have produced continuous beams of 2.5 × 105 cps for Xe44+ through a 1 mm aperture. With slightly high energy operation (electron beam energy: 78 keV) of the Tokyo EBIT, we have also obtained 103 ions/pulse for Ta70+ HCIs extracted by a pulse mode (trapping time: 3 sec). We are going to apply such HCI beams to nano-processes on solid surfaces by utilizing some useful characteristics of the HCI-interactions. Future perspective of HCI-based nano-science and -technology is presented.
81.16.-c Methods of nanofabrication and processing
Accelerators, beams and electromagnetism
Instrumentation and measurement
Surfaces, interfaces and thin films
Issue 1 (2004)
Masahide Tona and Satoshi Takahashi 2004 J. Phys.: Conf. Ser. 2 57
R P A C Newman 1987 Class. Quantum Grav. 4 277
N Heckenberg and K Dholakia 2007 J. Opt. A: Pure Appl. Opt. 9
P Dombi et al 2004 New J. Phys. 6 39
G C Kim et al 2009 J. Phys. D: Appl. Phys. 42 032005
Olivera Mišković and Rodrigo Olea JHEP12(2009)046
A Bunkowski et al 2009 J. Breath Res. 3 046001
E Centeno and D Felbacq 2001 J. Opt. A: Pure Appl. Opt. 3 S154
B Ziaja et al 2008 New J. Phys. 10 043003
Dennis Hohlfeld and Hans Zappe 2004 J. Opt. A: Pure Appl. Opt. 6 504