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Effect of annealing on magnetic properties of Nd-Fe-B thin films prepared by ECR ion beam sputtering method

R Tokumaru1, S Tamano1, S Goto1, S Madeswaran2, K Tokiwa1,2 and T Watanabe1

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Nd-Fe-B thin films were prepared by electron cyclotron resonance (ECR) ion beam sputtering and subsequent annealing. The influence of annealing on the magnetic properties and X-ray diffraction patterns of the product films was investigated. Amorphous films deposited at room temperature were annealed at temperatures between 600 and 800 °C. The c-axis oriented crystallization of the Nd2Fe14B phase did not appear by annealing of the buffer layer and magnetic Nd-Fe-B layer deposited at room temperature, and the hysteresis loops of the films indicated magnetic isotropy.


PACS

75.70.Ak Magnetic properties of monolayers and thin films

68.55.A- Nucleation and growth

75.50.Ww Permanent magnets

75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects

81.40.Gh Other heat and thermomechanical treatments

81.15.Cd Deposition by sputtering

Subjects

Condensed matter: electrical, magnetic and optical

Surfaces, interfaces and thin films

Condensed matter: structural, mechanical & thermal

Dates

Issue 1 (2009)



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