Journal of Physics: Conference Series
Volume 191
Number 1
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N Unno et al 2009 J. Phys.: Conf. Ser. 191 012014 doi:10.1088/1742-6596/191/1/012014
Three-dimensional metal nanoimprint technique for electrode and electric probe
N Unno1,2, J Taniguchi1, S Ide1, S Ishikawa1, Y Ootsuka3, K Yamabe3 and T Kanbara3
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Three-dimensional metal nanoimprint technique for electrode and electric probe
N Unno et al 2009 J. Phys.: Conf. Ser. 191 012014
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