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Size effect of large deformable nanopillar by focused-ion-beam chemical vapor deposition

H Tanaka1, M Shinkai1, Y Shibutani1,2 and Y Kogo3

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[1]
Matsui S, Kaito K, Fujita J, Komura M, Kanda K and Haruyama Y 2000 J. Vac. Sci. Technol. B 18 3168
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[2]
Matsui S 2007 Nucl. Instrum. Methods Phys. Res. B 257 758
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[3]
Morita T, Kometani R, Watanabe K, Kanda K, Hoshino T, Kondo K, Kaito T, Ichihashi T, Fujita J, Ishida M, Ochiai Y, Tajima T and Matsui S 2003 J. Vac. Sci. Technol. B 21 2737
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[4]
Fujita J, Ishida M, Sakamoto T, Ochiai Y, Kaito T and Matsui S 2001 J. Vac. Sci. Technol. B 19 2834
CrossRef 
[5]
Ishida M, Fujita J, Sakamoto T and Ochiai Y 2002 J. Vac. Sci. Technol. B 20 2784
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[6]
Fujita J, Ishida M, Ichihashi T, Ochiai Y, Kaito T and Matsui S 2003 Nucl. Instrum. Methods Phys. Res. B 206 472
CrossRef 
[7]
Shibutani Y and Yoshioka T 2008 J. Vac. Sci. Technol. B 26 201
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[8]
Koops H W, Kretz J, Rudolph M, Weber M, Dahm G and Lee L 1994 Japan. J. Appl. Phys. 33 7099
CrossRef 
[9]
Nishio M, Sawaya S, Akita S and Nakayama Y 2005 J. Vac. Sci. Technol. B 23 1975
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