H Tanaka et al 2009 J. Phys.: Conf. Ser. 191 012013 doi:10.1088/1742-6596/191/1/012013
H Tanaka1, M Shinkai1, Y Shibutani1,2 and Y Kogo3
Show affiliationsNanoscopic fabrication technique has been achieved by the direct deposition methods using focused-ion-beam chemical vapor deposition (FIB-CVD). The nanopillar fabricated by FIB-CVD consists of an outer amorphous carbon ring and a inner gallium core. We developed the original double-cantilever (DC) bending test using two pillars rigidly connected by the exposure of a focused electron beam in a scanning electron microscope. The obtained deflection curves suggest that nanopillars have the size dependence to the mechanical response. The pillar with the diameter over 180 nm exhibits a wide region of stiffness weakening after linear response and then becomes extremely hardened at a large deflection. Thus, the pillar intrinsically possesses much more flexibility for bending without any fracturing. The accuracy of a DC testing is also discussed by estimating the bending rigidities of nanopillars, comparing to those obtained by resonance frequency tests.
62.25.-g Mechanical properties of nanoscale systems
62.20.F- Deformation and plasticity
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
81.40.Lm Deformation, plasticity, and creep
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
Surfaces, interfaces and thin films
Issue 1 (2009)
H Tanaka et al 2009 J. Phys.: Conf. Ser. 191 012013
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