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Evaluation of nanoimprint lithography as a fabrication method of distributed feedback laser diodes

M Yanagisawa1,3, Y Tsuji1, H Yoshinaga1, K Hiratsuka1 and J Taniguchi2

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Chou S Y, Krauss P R and Renstrom P J 1995 Appl. Phys. Lett. 67 3114
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Bailey T, Choi B J, Colburn M, Meissl M, Shaya S, Ekerdt J G, Sreenivasan S V and Willson C G 2000 J. Vac. Sci. Technol. B 18 3572
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Miller M, Doyle G, Stacey N, Xu F, Sreenivasan S V, Watts M and LaBrake D L 2005 Proc. SPIE 5751 994
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