H Ofuchi et al 2009 J. Phys.: Conf. Ser. 190 012116 doi:10.1088/1742-6596/190/1/012116
Fluorescence XAFS study of local structures in high-k gate dielectrics HfSiON/SiON/Si annealed at various nitrogen gas partial pressure
H Ofuchi1, S Toyoda2,3,4, K Ikeda5, G L Liu5, Z Liu5 and M Oshima2,3,4
Show affiliationsGeometric structures for HfSiON/SiON/Si films annealed at various N2 gas partial pressures were investigated using fluorescence XAFS measurement at Hf LIII- and LI-edge. The XAFS analysis has revealed that the local structures around the Hf atoms strongly depend on the N2 gas partial pressure. For the sample annealed at the N2 gas partial pressure of 10 Torr HfN and HfSiON coexist, and for the samples annealed at the N2 gas partial pressure above 100 Torr Hf atoms form HfSiON only. These results indicate that the formation of HfN for HfSiON/SiON/Si films can be suppressed by annealing at proper partial pressure of N2 gas.
- PACS
-
78.70.Dm X-ray absorption spectra
77.22.Ch Permittivity (dielectric function)
- Subjects
-
Condensed matter: electrical, magnetic and optical
- Dates
-
Issue 1 (2009)
-
Fluorescence XAFS study of local structures in high-k gate dielectrics HfSiON/SiON/Si annealed at various nitrogen gas partial pressure
H Ofuchi et al 2009 J. Phys.: Conf. Ser. 190 012116
-
The dynamics of activated surface diffusion
Salvador Miret-Artés and Eli Pollak 2005 J. Phys.: Condens. Matter 17 S4133
-
Irreversible phase transitions in a dimer - monomer - monomer reaction model
Ezequiel V Albano 1996 J. Phys. A: Math. Gen. 29 3317
-
Positronium scattering by Ne, Ar, Kr and Xe in the frozen target approximation
Jennifer E Blackwood et al 2002 J. Phys. B: At. Mol. Opt. Phys. 35 2661
-
Asynchronous data-driven classification of weapon systems
Xin Jin et al 2009 Meas. Sci. Technol. 20 123001
-
Magnetic Energy of the Intergalactic Medium from Galactic Black Holes
P. P. Kronberg et al. 2001 ApJ 560 178
-
Measurements of double photoionization triple differential cross sections in atomic calcium in
experiments
K J Ross et al 1997 J. Phys. B: At. Mol. Opt. Phys. 30 L735
-
Automatic detection and classification of human epicardial atrial unipolar electrograms
B Dubé et al 2009 Physiol. Meas. 30 1303
-
Partial differential equations for self-organization in cellular and developmental biology
R E Baker et al 2008 Nonlinearity 21 R251
-
Gravitational mass attraction: properties of a right-angled parallelepiped for the LISA drag-free system
Aaron J Swank 2006 Class. Quantum Grav. 23 3437