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Journal of Physics: Conference Series

Volume 113

2008


FIFTEENTH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT 2007)
17–21 September 2007, Bulbank Hotel, Sozopol, Bulgaria

Accepted papers received: 29 April 2008
Published online: 27 May 2008

PREFACE

PLASMA PROCESSING, MODELING AND DIAGNOSTICS

THIN FILMS DEPOSITION AND APPLICATIONS

ION BEAM TECHNOLOGIES

E-BEAM, LASER AND MICROWAVE PROCESSING


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