Pieter Kok et al 2004 J. Opt. B: Quantum Semiclass. Opt. 6 S811 doi:10.1088/1464-4266/6/8/029
Pieter Kok1, Samuel L Braunstein2 and Jonathan P Dowling3
Show affiliationsWe explore the intimate relationship between quantum lithography, Heisenberg-limited parameter estimation and the rate of dynamical evolution of quantum states. We show how both the enhanced accuracy in measurements and the increased resolution in quantum lithography follow from the use of entanglement. Mathematically, the hyper-resolution of quantum lithography appears naturally in the derivation of Heisenberg-limited parameter estimation. We also review recent experiments offering a proof of the principle of quantum lithography, and we address the question of state preparation and the fabrication of suitable photoresists.
Issue 8 (August 2004)
Received 14 November 2003, accepted for publication 10 February 2004
Published 27 July 2004
Pieter Kok et al 2004 J. Opt. B: Quantum Semiclass. Opt. 6 S811
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