A Werber and H Zappe 2006 J. Opt. A: Pure Appl. Opt. 8 S313 doi:10.1088/1464-4258/8/7/S03
A Werber and H Zappe
Show affiliationsA novel design for tunable, membrane-based micro-mirrors is presented, using an elastomer membrane fabricated in a spin-coating process on a dry etched silicon substrate. The silicon mirror is etched from the substrate, fixed to the highly elastic 50 µm thick membrane and actuated by pneumatic pressure, which provides large deflection and a large range of deflection angle from 0° to 75°, relative to the substrate surface. Pressure actuation does not require high voltages to achieve large angles or stroke, making this approach suitable for endoscopic medical applications. Tilting mirrors and piston mirrors, as well as mirror arrays, may be made by this technique.
Issue 7 (July 2006)
Received 28 September 2005, accepted for publication 22 November 2005
Published 31 May 2006
A Werber and H Zappe 2006 J. Opt. A: Pure Appl. Opt. 8 S313
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