Alexandra Boltasseva 2009 J. Opt. A: Pure Appl. Opt. 11 114001 doi:10.1088/1464-4258/11/11/114001
Plasmonic components fabrication via nanoimprint
REVIEW ARTICLEAlexandra Boltasseva
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DTU, Technical
University of Denmark, DTU Building 343, DK-2800 Kongens Lyngby,
Denmark
REVIEW ARTICLE
A review report on nanoimprinted plasmonic components is given. The fabrication of different metal–dielectric geometries and nanostructured surfaces that support either propagating or localized surface plasmon modes is discussed. The main characteristics and advantages of the nanoimprint technology for the fabrication of various plasmonic structures are outlined. The discussion of plasmonic waveguiding structures focuses on planar waveguides based on metal strips embedded into a dielectric and on profiled metal surfaces. Nanoimprint-based fabrication of two-dimensional nanostructured plasmonic surfaces for enhanced transmission studies and sensor applications is also discussed. Throughout the report, the main fabrication schemes are described, as well as the challenges facing future manufacturing of plasmonic components for device applications.
- PACS
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42.79.Gn Optical waveguides and couplers
42.82.Cr Fabrication techniques; lithography, pattern transfer
- Subjects
- Dates
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Issue 11 (November 2009)
Received 31 March 2009, accepted for publication 14 July 2009
Published 16 September 2009
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Plasmonic components fabrication via nanoimprint
Alexandra Boltasseva 2009 J. Opt. A: Pure Appl. Opt. 11 114001
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