F W Meyer et al 2007 Phys. Scr. 2007 50 doi:10.1088/0031-8949/2007/T128/010
Low energy chemical sputtering of ATJ graphite by atomic and molecular deuterium ions
F W Meyer1, P S Krstic1, L I Vergara1, H F Krause1, C O Reinhold1 and S J Stuart2
Show affiliationsWe present experimental chemical sputtering results for D+, D2+ and D3+ ions incident on ATJ graphite in the energy range 5–60 eV D−1, and compare them with simulations for deuterated amorphous carbon impacted by neutral D, D2 and D3. The measured methane yields/D for the different species compared at the same energy/D diverge below about 60 eV D−1, the incident triatomic molecular ions leading to the largest yields/D, and the atomic ions to the smallest, reaching a factor of two difference at 10 eV/D. The measured yields/D are in reasonable agreement with molecular dynamics simulations over the entire calculated energy range. The model surfaces were prepared by D, D2 and D3 impacts in a way that mimics the experiment. For D2 incident at energies below 15 eV/D, the simulations show a strong dependence of the sputtering yields on the vibrational state of the incident projectile.
- PACS
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79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces
68.49.Sf Ion scattering from surfaces (charge transfer, sputtering, SIMS)
- Subjects
- Dates
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Issue T128 (March 2007)
Received 10 October 2006, in final form 14 December 2006
Published 8 March 2007
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Low energy chemical sputtering of ATJ graphite by atomic and molecular deuterium ions
F W Meyer et al 2007 Phys. Scr. 2007 50
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