P S Krstic et al 2007 New J. Phys. 9 209 doi:10.1088/1367-2630/9/7/209
Chemical sputtering from amorphous carbon under bombardment by deuterium atoms and molecules
P S Krstic1,3, C O Reinhold1 and S J Stuart2
Show affiliationsWe perform classical molecular dynamics simulations of the chemical sputtering of deuterated amorphous carbon surfaces by D and D2, at energies of 7.5–30 eV D−1. Particular attention is paid to the preparation of the target surfaces for varying impact projectile fluence, energy and species, to the vibrational state of D2 projectiles, as well as to the variation in sputtering yields with target surface and impact projectile. The methane and acetylene sputtering yields per deuteron, obtained with atomic and molecular projectiles, agree quantitatively with recent experimental values. We study the distribution of sputtered species, as well as their kinetic energy and angular spectra.
- PACS
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79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces
61.43.Bn Structural modeling: serial-addition models, computer simulation
- Subjects
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Condensed matter: electrical, magnetic and optical
- Dates
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Issue 7 (July 2007)
Received 28 March 2007
Published 4 July 2007
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Chemical sputtering from amorphous carbon under bombardment by deuterium atoms and molecules
P S Krstic et al 2007 New J. Phys. 9 209
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