A N Cleland 2005 New J. Phys. 7 235 doi:10.1088/1367-2630/7/1/235
Thermomechanical noise limits on parametric sensing with nanomechanical resonators
Focus on Nano-electromechanical SystemsA N Cleland
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Measuring and monitoring the dynamic parameters of a nanomechanical resonator, in particular the resonance frequency, has received significant attention recently, in part due to the possibility of very sensitive, fast and precise mass sensing. Added mass can include chemisorbed or physisorbed metals or organic molecules, and if sufficiently high sensitivity, dynamic range and detector speed can be achieved, they could have applications in, e.g., proteomics. Here, I investigate some of the fundamental limits to mass sensing in such resonators, discussing the limits imposed by thermomechanical noise on both the linear operating regime of a simple harmonic oscillator, and the equivalent limits on nonlinear parametric amplifiers used as parametric sensors. The model system is a cantilevered flexural resonator, but the results apply equally well (in most cases) to doubly clamped or torsional resonant structures as well.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
84.30.Ng Oscillators, pulse generators, and function generators
- Subjects
- Dates
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Issue 1 (November 2005)
Received 12 July 2005
Published 29 November 2005
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Thermomechanical noise limits on parametric sensing with nanomechanical resonators
A N Cleland 2005 New J. Phys. 7 235
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