F Linke and R Merkel 2005 New J. Phys. 7 128 doi:10.1088/1367-2630/7/1/128
Quantitative ellipsometric microscopy at the glass–water interface
F Linke1 and R Merkel2
Show affiliationsEllipsometric microscopy is a technique for simultaneous measurement of thin film thickness and index of refraction at a lateral resolution of approximately 1 μm. Up to now this technique has been used on silicon–air interfaces. However, biological processes take place often in aqueous solution and are studied at the glass–water interface. Due to the very low reflectivity of this interface we had to improve ellipsometric microscopy substantially. Here we present our approach to suppress the intensity of internal stray light by several orders of magnitude and show quantitative and laterally resolved ellipsometric measurements at the glass–water interface. When instrumental polarization was taken into account, an accuracy of δΨ = 0.41° and δΔ = 4.3° was achieved.
- PACS
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68.55.-a Thin film structure and morphology
- Subjects
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Soft matter, liquids and polymers
Instrumentation and measurement
- Dates
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Issue 1 (May 2005)
Received 23 February 2005
Published 20 May 2005
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Quantitative ellipsometric microscopy at the glass–water interface
F Linke and R Merkel 2005 New J. Phys. 7 128
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