Complementary Metal–Oxide–Semiconductor Image Sensor with Microchamber Array for Fluorescent Bead Counting

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Published 20 February 2012 • Copyright (c) 2012 The Japan Society of Applied Physics
, , Citation Kiyotaka Sasagawa et al 2012 Jpn. J. Appl. Phys. 51 02BL01 DOI 10.1143/JJAP.51.02BL01

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Author affiliations

1 Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan

2 Department of Applied Chemistry, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan

3 JST-CREST, Kawaguchi, Saitama 331-0012, Japan

Dates

  1. Received 26 September 2011
  2. Accepted 11 November 2011
  3. Published

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Abstract

We fabricated a complementary metal–oxide–semiconductor image sensor with a femtoliter microchamber array. The microchamber array plate is used for trapping microbeads and limiting the incident angle of light detected by the sensor. The sensor has an interference filter for fluorescent microbeads imaging. We detected fluorescent and nonfluorescent microbead with this sensor and showed its capability for counting the number of fluorescent chambers.

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