Ki Bang Lee 2009 Smart Mater. Struct. 18 115004 doi:10.1088/0964-1726/18/11/115004
Ki Bang Lee
Show affiliationsA theoretical response of an electrostatic gap-closing actuator based on parallel plates to constant and low-frequency accelerations has been derived as a function of the applied acceleration and voltage. The nonlinear equation of motion is obtained in a dimensionless form from the fact that the inertial and damping forces are neglected at a frequency much less than the resonant frequency of the parallel plate, and thereafter the nonlinear equation is solved for the stable inter-plate gap at the acceleration and voltage. From the derived solution, the pull-in acceleration is obtained as a function of the applied voltage, and the pull-in voltage is also expressed as a function of the acceleration. The closed-form solution is validated by comparison with a numerical solution. The theoretical solution is in excellent agreement with the numerical results when the actuator is exposed to a constant acceleration as well as a low-frequency acceleration. The theoretical solution and pull-in acceleration and voltage thus provide guidance to prescribe operational constraints for devices that use the parallel plate actuator and to predict the response of the electrostatic gap-closing parallel plates to constant and low-frequency acceleration.
46.70.De Beams, plates and shells
Issue 11 (November 2009)
Received 20 March 2009, in final form 22 July 2009
Published 11 September 2009
Ki Bang Lee 2009 Smart Mater. Struct. 18 115004
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