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Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

REVIEW ARTICLE

K A Cook-Chennault1, N Thambi2 and A M Sastry3,4,5

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TOPICAL REVIEW

Power consumption is forecast by the International Technology Roadmap of Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor industry. The purpose of this paper is threefold: (1) to provide an overview of strategies for powering MEMS via non-regenerative and regenerative power supplies; (2) to review the fundamentals of piezoelectric energy harvesting, along with recent advancements, and (3) to discuss future trends and applications for piezoelectric energy harvesting technology. The paper concludes with a discussion of research needs that are critical for the enhancement of piezoelectric energy harvesting devices.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

85.50.-n Dielectric, ferroelectric, and piezoelectric devices

84.60.Jt Photoelectric conversion: solar cells and arrays

85.30.-z Semiconductor devices

Subjects

Electronics and devices

Semiconductors

Nanoscale science and low-D systems

Dates

Issue 4 (August 2008)

Received 3 August 2007, in final form 24 March 2008

Published 9 June 2008



  1. Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

    K A Cook-Chennault et al 2008 Smart Mater. Struct. 17 043001

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