Hargsoon Yoon et al 2003 Smart Mater. Struct. 12 769 doi:10.1088/0964-1726/12/5/014
Hargsoon Yoon, K J Vinoy and Vijay K Varadan
Show affiliationsIn this paper, the design concepts and measurement results for a compact phase shifter are presented. By employing high dielectric constant materials and bilateral interdigital coplanar waveguide designs, we have demonstrated an analog Ka-band phase shifter on an 8 mm2 area. This device uses barium strontium titanate thin films to realize electrically tunable transmission line components. Modifications to improve the accuracy of analytical formulae for the capacitance of interdigital structures have been proposed. Fabrication processes presented here are fully compatible with lateral double diffused metal oxide semiconductors on high resistivity silicon, thus enabling the integration of a voltage controller. The device presented here can also be modified as a delay line that gives 180° phase delay at 10 GHz with a line length of just 2.8 mm.
84.40.Az Waveguides, transmission lines, striplines
84.30.Qi Modulators and demodulators; discriminators, comparators, mixers, limiters, and compressors
85.50.-n Dielectric, ferroelectric, and piezoelectric devices
Issue 5 (October 2003)
Received 30 May 2003, in final form 31 July 2003
Published 25 September 2003
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