Raymond Mercier and Michel Lamare 1997 Pure Appl. Opt. 6 773 doi:10.1088/0963-9659/6/6/019
Raymond Mercier and Michel Lamare
Show affiliationsIn order to achieve nanometric precision along with high spatial resolution in absolute optical surface testing, we have developed a new version of the two-surface method and as an initial test applied it to a square field on optical flats. It was obviously necessary to extend the method to a more generally shaped field, which we shall discuss. Nanometric repeatability had been obtained, but accuracy requires a comparison with another method. In this paper, we give experimental results of a comparison with the three-flat method, along the section accessible to the latter method, showing nanometric agreement between the two methods.
Issue 6 (November 1997)
Received 20 May 1997
Raymond Mercier and Michel Lamare 1997 Pure Appl. Opt. 6 773
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