Experimental studies of Ar plasma in a planar inductive discharge

A Langmuir probe was used to determine the electron density, electron temperature, plasma potential and the electron energy probability function (EEPF) in /Ar plasma in a planar inductive discharge. We find that the electron density increases with increased fractional Ar pressure. The relative ion densities were measured by mass spectrometry. The dominant ions in plasma in the pressure range investigated (10-40 mTorr) are found to be and of roughly equal densities.