K Kurihara and M Sekine 1996 Plasma Sources Sci. Technol. 5 121 doi:10.1088/0963-0252/5/2/002
plasma
K Kurihara and M Sekine
Show affiliationsIon species and their energy distributions impinging on a powdered electrode are investigated through high-aspect-ratio holes in the
plasma of a magnetron etcher. A decrease in ion current and a change in ion energy distribution depending on the aspect ratio of holes were observed. The effects of inclined ion trajectory and charging at the side wall were examined theoretically and experimentally. It was found that the charging and a deposit on the side wall of holes greatly influenced the ions passing through holes.
Issue 2 (May 1996)
Received 9 October 1995, in final form 19 January 1996
plasma
K Kurihara and M Sekine 1996 Plasma Sources Sci. Technol. 5 121
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