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Plasma characteristics observed through high-aspect-ratio holes in plasma

K Kurihara and M Sekine

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Ion species and their energy distributions impinging on a powdered electrode are investigated through high-aspect-ratio holes in the plasma of a magnetron etcher. A decrease in ion current and a change in ion energy distribution depending on the aspect ratio of holes were observed. The effects of inclined ion trajectory and charging at the side wall were examined theoretically and experimentally. It was found that the charging and a deposit on the side wall of holes greatly influenced the ions passing through holes.


PACS

52.27.-h Basic studies of specific kinds of plasmas

52.40.Kh Plasma sheaths

52.25.Jm Ionization of plasmas

Subjects

Plasma physics

Dates

Issue 2 (May 1996)

Received 9 October 1995, in final form 19 January 1996



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