R A Stewart et al 1995 Plasma Sources Sci. Technol. 4 36 doi:10.1088/0963-0252/4/1/005
R A Stewart, P Vitello, D B Graves, E F Jaeger and L A Berry
Show affiliationsA two-dimensional (r, z) fluid model is used to study plasma transport in inductively coupled plasmas (ICPS). Electron heating from external RF coil driven at 2 MHz is calculated self-consistently by solving for the time-averaged RF electric field. Radial plasma uniformity has been studied in both high (R/L=2.5) and low (R/L=1) aspect ratio ICP reactors driven with external planar or cylindrical coils. The effect of neutral gas pressure on plasma uniformity is presented for Ar discharges at 5 and 20 mTorr. The location of external coils and corresponding power deposition profile is predicted to have little effect on uniformity except at higher pressure (>or approximately= 20 mTorr) and for large aspect ratios. Planar coils appear superior to cylindrical coils for achieving relatively consistent uniformity over a wide range of pressures and reactor aspect ratios.
52.30.Ex Two-fluid and multi-fluid plasmas
52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
Issue 1 (February 1995)
R A Stewart et al 1995 Plasma Sources Sci. Technol. 4 36
G Jones and J Woods 1976 J. Phys. D: Appl. Phys. 9 799
A I Kolesnikov et al 1994 J. Phys.: Condens. Matter 6 375
Roberto Baldoni et al 1999 Distrib. Syst. Engng. 6 71
R Stadler et al 2003 Nanotechnology 14 138
Gennady Shvets and Yaroslav A Urzhumov 2005 J. Opt. A: Pure Appl. Opt. 7 S23
Mladen Pavičić et al 2005 J. Phys. A: Math. Gen. 38 1577
T T Tan et al 2001 Supercond. Sci. Technol. 14 78
A Carlini and M Martellini 1992 Class. Quantum Grav. 9 629
A Schröter et al 1993 Phys. Scr. 48 184