Quick search Find article
Quick search
Find article

Non-invasive VHF monitoring of low-temperature atmospheric pressure plasma

V J Law1, S Daniels1, J L Walsh2, M G Kong2, L M Graham3 and T Gans3

Show affiliations


A real-time VHF swept frequency (20–300 MHz) reflectometry measurement for radio-frequency capacitive-coupled atmospheric pressure plasmas is described. The measurement is scalar, non-invasive and deployed on the main power line of the plasma chamber. The purpose of this VHF signal injection is to remotely interrogate in real-time the frequency reflection properties of plasma. The information obtained is used for remote monitoring of high-value atmospheric plasma processing. Measurements are performed under varying gas feed (helium mixed with 0–2% oxygen) and power conditions (0–40 W) on two contrasting reactors. The first is a classical parallel-plate chamber driven at 16 MHz with well-defined electrical grounding but limited optical access and the second is a cross-field plasma jet driven at 13.56 MHz with open optical access but with poor electrical shielding of the driven electrode. The electrical measurements are modelled using a lumped element electrical circuit to provide an estimate of power dissipated in the plasma as a function of gas and applied power. The performances of both reactors are evaluated against each other. The scalar measurements reveal that 0.1% oxygen admixture in helium plasma can be detected. The equivalent electrical model indicates that the current density between the parallel-plate reactor is of the order of 8–20 mA cm−2. This value is in accord with 0.03 A cm−2 values reported by Park et al (2001 J. Appl. Phys. 89 20–8). The current density of the cross-field plasma jet electrodes is found to be 20 times higher. When the cross-field plasma jet unshielded electrode area is factored into the current density estimation, the resultant current density agrees with the parallel-plate reactor. This indicates that the unshielded reactor radiates electromagnetic energy into free space and so acts as a plasma antenna.


PACS

52.70.Gw Radio-frequency and microwave measurements

52.40.Fd Plasma interactions with antennas; plasma-filled waveguides

52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons

52.50.Dg Plasma sources

Subjects

Instrumentation and measurement

Plasma physics

Dates

Issue 3 (June 2010)

Received 6 August 2009, in final form 25 November 2009

Published 21 May 2010



  1. Non-invasive VHF monitoring of low-temperature atmospheric pressure plasma

    V J Law et al 2010 Plasma Sources Sci. Technol. 19 034008

  2. Thomson scattering at Pilot-PSI and Magnum-PSI

    G J van Rooij et al 2009 Plasma Phys. Control. Fusion 51 124037

  3. Measurement of electric fields due to time-varying magnetic field gradients using dipole probes

    P M Glover and R Bowtell 2007 Phys. Med. Biol. 52 5119

  4. Rapid measurement of deuterium content of breath following oral ingestion to determine body water

    Simon Davies et al 2001 Physiol. Meas. 22 651

  5. Stabilization of the resistive shell mode in tokamaks

    R. Fitzpatrick and A.Y. Aydemir 1996 Nucl. Fusion 36 11

  6. Stability of coupled tearing modes in tokamaks

    R. Fitzpatrick et al 1993 Nucl. Fusion 33 1533

  7. Dynamical transitions of Turing patterns

    Hans G Kaper et al 2009 Nonlinearity 22 601

  8. Parabolic Julia sets are polynomial time computable

    Mark Braverman 2006 Nonlinearity 19 1383

  9. Exponential mixing for a stochastic partial differential equation driven by degenerate noise

    M Hairer 2002 Nonlinearity 15 271

  10. Bifurcations and strange attractors in the Lorenz-84 climate model with seasonal forcing

    Henk Broer et al 2002 Nonlinearity 15 1205

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.