V J Law et al 2010 Plasma Sources Sci. Technol. 19 034008 doi:10.1088/0963-0252/19/3/034008
V J Law1, S Daniels1, J L Walsh2, M G Kong2, L M Graham3 and T Gans3
Show affiliationsA real-time VHF swept frequency (20–300 MHz) reflectometry measurement for radio-frequency capacitive-coupled atmospheric pressure plasmas is described. The measurement is scalar, non-invasive and deployed on the main power line of the plasma chamber. The purpose of this VHF signal injection is to remotely interrogate in real-time the frequency reflection properties of plasma. The information obtained is used for remote monitoring of high-value atmospheric plasma processing. Measurements are performed under varying gas feed (helium mixed with 0–2% oxygen) and power conditions (0–40 W) on two contrasting reactors. The first is a classical parallel-plate chamber driven at 16 MHz with well-defined electrical grounding but limited optical access and the second is a cross-field plasma jet driven at 13.56 MHz with open optical access but with poor electrical shielding of the driven electrode. The electrical measurements are modelled using a lumped element electrical circuit to provide an estimate of power dissipated in the plasma as a function of gas and applied power. The performances of both reactors are evaluated against each other. The scalar measurements reveal that 0.1% oxygen admixture in helium plasma can be detected. The equivalent electrical model indicates that the current density between the parallel-plate reactor is of the order of 8–20 mA cm−2. This value is in accord with 0.03 A cm−2 values reported by Park et al (2001 J. Appl. Phys. 89 20–8). The current density of the cross-field plasma jet electrodes is found to be 20 times higher. When the cross-field plasma jet unshielded electrode area is factored into the current density estimation, the resultant current density agrees with the parallel-plate reactor. This indicates that the unshielded reactor radiates electromagnetic energy into free space and so acts as a plasma antenna.
52.70.Gw Radio-frequency and microwave measurements
52.40.Fd Plasma interactions with antennas; plasma-filled waveguides
52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
Issue 3 (June 2010)
Received 6 August 2009, in final form 25 November 2009
Published 21 May 2010
V J Law et al 2010 Plasma Sources Sci. Technol. 19 034008
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