J Kim et al 2010 Plasma Sources Sci. Technol. 19 015003 doi:10.1088/0963-0252/19/1/015003
Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition
J Kim, K Tsugawa, M Ishihara, Y Koga and M Hasegawa
Show affiliationsAn advanced slot antenna was developed and the enlargement of surface wave plasma was experimentally investigated using the array configuration of slot antennas for large-area nanocrystalline diamond (NCD) film depositions. An original-geometry slot antenna with an annular shape, designed in this work, permitted broad microwave radiations and vast extent of plasma propagations. Uniform plasmas were produced over a deposition area of 600 × 360 mm2 with densities of ~1017 m−3 using hydrogen gas by an array configuration of five slot antennas and four rows of the array. A uniform (thickness variation: 10%) and smooth (Ra: 11 nm) NCD film deposition on a 300 × 300 mm2 borosilicate glass plate was achieved using the plasma and a mixed gas of H2/CH4/CO2.
- PACS
-
52.40.Fd Plasma interactions with antennas; plasma-filled waveguides
52.77.Dq Plasma-based ion implantation and deposition
81.16.-c Methods of nanofabrication and processing
81.15.-z Methods of deposition of films and coatings; film growth and epitaxy
- Subjects
- Dates
-
Issue 1 (February 2010)
Received 23 April 2009, in final form 17 September 2009
Published 20 October 2009
-
Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition
J Kim et al 2010 Plasma Sources Sci. Technol. 19 015003
-
Fast inference for statistical inverse problems
Matthew A Taddy et al 2009 Inverse Problems 25 085001
-
Formal Maurer-Cartan structures: from CFT to Classical Field Equations
Anton M. Zeitlin JHEP12(2007)098
-
Equivalence of QCD in the
-regime and chiral random matrix theory with or without chemical potential
F. Basile and G. Akemann JHEP12(2007)043
-
Final report on comparison EURO.QM-S1: Automotive exhaust gas
Maite López et al 2008 Metrologia 45 08003
-
Green functions for topology change
Jérôme Martin et al JHEP03(2005)060
-
A preparative comparison using the 'harmonization' method on standards of synthetic natural gas (CCQM-P87)
G Vargha et al 2008 Metrologia 45 08004
-
Bifurcations of a weighted-residual integral boundary-layer model for nonlinear dynamics of falling liquid films
Alexander Oron et al 2007 J. Phys.: Conf. Ser. 64 012007
-
Natural extension of the generalized uncertainty principle
C Bambi and F R Urban 2008 Class. Quantum Grav. 25 095006
-
Cosmological evolution of alpha driven by a general coupling with quintessence
Valerio Marra and Francesca Rosati JCAP05(2005)011
Users also read
What's this?- High-speed imaging investigation of transition phenomena in the pilot arc phase in Hf cathodes for plasma arc cutting
- A database for V–V state-to-state rate constants in N2–N2 and N2–CO collisions in a wide temperature range: dynamical calculations and analytical approximations
- Transport coefficients and cross sections for electrons in N2O and N2O/N2 mixtures