E Despiau-Pujo and P Chabert 2009 Plasma Sources Sci. Technol. 18 045028 doi:10.1088/0963-0252/18/4/045028
E Despiau-Pujo and P Chabert
Show affiliationsExperimental studies have shown that low-pressure inductive discharges with attaching gases are subject to instabilities near the transition between capacitive (E) and inductive (H) modes. A global model, consisting of two particle and one energy balance equations, has been previously proposed to describe the instability mechanism. This model, which agrees qualitatively well with experimental observations, leaves significant quantitative differences. In this paper, the model is revisited with Cl2 as the feedstock gas. A novel treatment of inductive power deposition is evaluated and chlorine chemistry is included. Old and new models are systematically compared. It is found that the alternative inductive coupling description slightly modifies the results. The effect of gas chemistry is even more pronounced. The instability window is smaller in pressure and larger in absorbed power, the frequency is higher and the amplitudes of oscillations are reduced. The feedstock gas is weakly dissociated (≈16%) and
is the dominant positive ion, which is consistent with the moderate electron density during the instability cycle.
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
52.35.Fp Electrostatic waves and oscillations (e.g., ion-acoustic waves)
Issue 4 (November 2009)
Received 5 May 2009, in final form 26 August 2009
Published 6 October 2009
E Despiau-Pujo and P Chabert 2009 Plasma Sources Sci. Technol. 18 045028
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S Hild et al 2009 Class. Quantum Grav. 26 055012
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