J Choi et al 2009 Plasma Sources Sci. Technol. 18 025029 doi:10.1088/0963-0252/18/2/025029
J Choi1, F Iza2, H J Do3, J K Lee1 and M H Cho3
Show affiliationsWe report the design, fabrication and characterization of two microwave-excited microplasma sources based on coaxial transmission line resonators (CTLR). The sources are capable of generating electric fields of ~106 V m−1 at 900 MHz and 2.45 GHz. These devices can self-ignite helium or argon discharges in a wide pressure range including atmospheric pressure. The gas temperature in an argon discharge open to atmospheric air is ~400 K. Using air as a dielectric, the working gases can be passed through the CTLR, resulting in the formation of plasma jets suitable for surface treatments. The device efficiency on transferring the input power into the plasma is 50–85% depending on the gas used. No thermal damage or electrode erosion has been observed in the devices.
Issue 2 (May 2009)
Received 28 October 2008, in final form 10 February 2009
Published 31 March 2009
J Choi et al 2009 Plasma Sources Sci. Technol. 18 025029
David C Zimmerman et al 2005 Plasma Sources Sci. Technol. 14 581
Natalia Denisova 2004 Plasma Sources Sci. Technol. 13 531
L Oksuz and N Hershkowitz 2004 Plasma Sources Sci. Technol. 13 263
J Kawahara et al 2003 Plasma Sources Sci. Technol. 12 S80
Li Li et al 2011 J. Micromech. Microeng. 21 025022
Tianzhun Wu et al 2010 J. Micromech. Microeng. 20 085043
A G Gillies and R S Fearing 2010 J. Micromech. Microeng. 20 105011
M J Lopez et al 2008 J. Micromech. Microeng. 18 075021
Jui-che Tsai et al 2008 J. Micromech. Microeng. 18 015015